自动化电场纳米线表征,操作和组装

Kaiyan Yu, J. Yi, J. Shan
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引用次数: 5

摘要

我们提出了一种集成的、基于电场的方法,通过可选择的电导率和精确控制的位置和方向,将纳米线(ACMAN)自动表征、操纵和组装成纳米器件。我们结合了基于电泳的运动控制,规划和操作策略以及非接触式和基于溶液的电取向光谱(EOS)来同时表征和操作多个单独的纳米线。ACMAN是一个完整的自动化和在线过程,形成具有所需电性能的功能性纳米器件。我们通过将场效应晶体管(fet)与选定电导率的硅纳米线组装在一起来验证ACMAN设计。实验结果证实了ACMAN工艺所制备的场效应管的高性能。
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Automated Electric-Field-Based Nanowire Characterization, Manipulation, and Assembly
We present an integrated, electric-field-based method for Automated Characterization, Manipulation, and Assembly of Nanowires (ACMAN) into nanodevices by selectable electrical conductivities with precisely controlled positions and orientations. We combine electrophoresis-based motion-control, planning and manipulation strategies and contactless and solution-based electro-orientation spectroscopy (EOS) to simultaneously characterize and manipulate multiple individual nanowires. The ACMAN is a complete automated and online process to form functional nanodevice with desired electrical properties. We validate the ACMAN design by assembling field-effect transistors (FETs) with silicon nanowires of selected electrical conductivities. The results confirm the high performance of the FET by the ACMAN process.
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