生长温度对Ni-Co双金属催化剂CVD合成碳纳米管的影响

IF 1.2 Q4 NANOSCIENCE & NANOTECHNOLOGY international journal of nano dimension Pub Date : 2016-08-01 DOI:10.7508/IJND.2016.03.007
S. Madani, K. Zare, M. Ghoranneviss
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引用次数: 1

摘要

研究了温度变化对热化学气相沉积法(TCVD)制备碳纳米管的影响。以硅(Si)衬底上的镍和钴(Ni-Co)薄膜为催化剂,进行了TCVD技术的研究。在850 ~ 1000℃的控制温度范围内,使用乙炔气体生长CNTs,并使用原子力显微镜(AFM)、能量色散x射线(EDX)、场发射扫描电子显微镜(FESEM)和拉曼光谱对催化剂进行了表征。结果表明,CNTs的直径随温度的升高而增大。在温度范围内,CNTs的直径从70 nm不断增加到180 nm。此外,CNTs的结晶度也有所下降。
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Role of growth temperature in CVD synthesis of Carbon nanotubes from Ni-Co bimetallic catalysts
The effect of temperature variation on the growth of Carbon Nanotubes (CNTs) using Thermal Chemical Vapor Deposition (TCVD) is presented. Nickel and Cobalt (Ni-Co) thin films on Silicon (Si) substrates were used as catalysts in TCVD technique. Acetylene gas was used in CNTs growth process at the controlled temperature ranges from 850-1000 C. Catalysts and CNTs characterization was carried out using Atomic Force Microscopy (AFM), Energy Dispersive X-ray (EDX), Field Emission Scanning Electron Microscopy (FESEM) and Raman spectroscopy. It was found that the CNTs diameters increased with the temperature. The CNTs diameters were continually increased from 70 nm to 180 nm in the temperature range. In addition, the degree of crystallinity of the grown CNTs decreased.
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来源期刊
international journal of nano dimension
international journal of nano dimension NANOSCIENCE & NANOTECHNOLOGY-
CiteScore
2.80
自引率
20.00%
发文量
0
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