微尺寸工件的非接触式自动检测

2011 International Conference on Electrical and Control Engineering Pub Date : 2011-10-24 DOI:10.1109/ICECENG.2011.6057257

Shuhua Jiang

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引用次数: 0

摘要

研究了一种基于CCD矩阵和计算机的二维非接触自动测量系统。以微尺寸矩形工件为例进行了试验。实验结果表明，该方法的绝对精度小于3 μm。该仪器精度高，重复性好，可用于生产线，实现在线测试。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Non-contact and automatic test of micro-size work-piece

A test system with the CCD matrix and computer is researched to realize 2-D non-contact and automatic measurement. Micro-size rectangle work-piece is tested as example. The experiments show that the absolute precision is less than 3 μm. The instrument possesses the high accuracy and good repeatability, the system may be used in the product line and makes on line testing possible.

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2011 International Conference on Electrical and Control Engineering

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