硅和III-V型太阳能电池:从权宜之计到运作模式

A. Buzynin, Yu. N. Buzynin, V. Shengurov, V. Voronkov, A. Menke, A. E. Luk’yanov, V. Panov, N. Baidus
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引用次数: 1

摘要

本文考虑了发展高效硅基和iii - v基太阳能电池的一些新机遇:在硅中形成p-n结的节能环保低温技术(1),结构完善的GaAs/Ge/Si外延衬底的制备(2)以及基于立方氧化锆的保护性增透涂层的应用(3)。结果:1)阐述了在硅中形成p-n结的新技术。该技术为太阳能电池等半导体器件的生产提供了简单且相对便宜的工艺。本研究技术的本质是在硅中形成p-n结,这是由于样品中杂质的重新分配导致的,杂质在被离子处理之前已经存在于样品中。它不同于扩散和离子掺杂技术,在扩散和离子掺杂技术中,样品中的电导率变化和p-n结的形成是由于从外部引入其他掺杂剂原子的结果;2)制备GaAs/Ge/Si外延衬底的条件,该外延衬底具有(1 -2)× 105 cm-2密度的GaAs层中螺纹位错(ga -2)为薄(200 nm)的Ge缓冲层。采用热丝化学气相沉积法制备Ge缓冲液,采用金属有机化学气相沉积法制备了厚度为1 μm的GaAs层。获得了表面均方根粗糙度小于1 nm的GaAs层,具有良好的光致发光性能和较高的均匀性;3)确定了磁控溅射和电子束溅射在Si和GaAs衬底上合成均匀功能(缓冲、绝缘和保护)的条件。钛酸盐薄膜已被证明是一种理想的抗反射材料,具有很高的保护和防腐性能。
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Silicon and III-V Solar Cells: From Modus Vivendi to Modus Operandi
In the present paper, some novel opportunities for the development of high-efficient Si and III-V-based solar cells are considered: energy-saving environment friendly low-temperature technology of forming p-n junctions in Si (1), elaboration of structurally perfect GaAs/Ge/Si epitaxial substrates (2) and application of protective antireflecting coatings based on cubic zirconia (3). As a result: 1) New technique of forming p-n junctions in silicon has been elaborated. The technique provided easy and comparatively cheap process of production of semiconductor devices such as solar cells. The essence of the technique under the study is comprised in formation p-n junctions in silicon by a change of conductivity in the bulk of the sample occurring as a result of redistribution of the impurities, which already exists in the sample before its processing by ions. It differs from the techniques of diffusion and ion doping where change of conductivity and formation of p-n junction in the sample occur as a result of introduction of atoms of the other dopants from the outside; 2) The conditions for synthesis of GaAs/Ge/Si epitaxial substrates with a thin (200 nm) Ge buffer layer featured with (1 - 2) × 105 cm-2 density of the threading dislocation in the GaAs layer. Ge buffer was obtained by chemical vapor deposition with a hot wire and GaAs layer of 1 μm thick was grown by the metal organic chemical vapor deposition. Root mean square surface roughness of GaAs layers of the less than 1 nm and good photoluminescence properties along with their high uniformity were obtained; 3) The conditions ensuring the synthesis of uniform functional (buffer, insulating and protective) fianite layers on Si and GaAs substrates by means of magnetron and electron-beam sputtering have been determined. Fianite films have been shown to be suitable for the use as an ideal anti-reflecting material with high protective and anticorrosive properties.
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