{"title":"衬底预处理对多层结构性能变化的预测","authors":"E. L. Pankratov","doi":"10.11591/ijaas.v11.i4.pp345-355","DOIUrl":null,"url":null,"abstract":"In this paper, we analyze the effect of the preliminary processing of substrate on the properties of the grown heterostructure. It has been shown that the growth of an epitaxial layer on a buffer layer after preliminary (before starting of growth) annealing makes it possible to decrease the value of mismatch-induced stress. An analytical approach has been introduced for the analysis of mass and heat transfer in a multilayer structure with account mismatch-induced stress.","PeriodicalId":44367,"journal":{"name":"International Journal of Advances in Engineering Sciences and Applied Mathematics","volume":"138 1","pages":""},"PeriodicalIF":1.2000,"publicationDate":"2022-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"On prognosis of variation of properties of multilayer structure by preliminary processing of the substrate\",\"authors\":\"E. L. Pankratov\",\"doi\":\"10.11591/ijaas.v11.i4.pp345-355\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, we analyze the effect of the preliminary processing of substrate on the properties of the grown heterostructure. It has been shown that the growth of an epitaxial layer on a buffer layer after preliminary (before starting of growth) annealing makes it possible to decrease the value of mismatch-induced stress. An analytical approach has been introduced for the analysis of mass and heat transfer in a multilayer structure with account mismatch-induced stress.\",\"PeriodicalId\":44367,\"journal\":{\"name\":\"International Journal of Advances in Engineering Sciences and Applied Mathematics\",\"volume\":\"138 1\",\"pages\":\"\"},\"PeriodicalIF\":1.2000,\"publicationDate\":\"2022-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Journal of Advances in Engineering Sciences and Applied Mathematics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.11591/ijaas.v11.i4.pp345-355\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"ENGINEERING, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Journal of Advances in Engineering Sciences and Applied Mathematics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.11591/ijaas.v11.i4.pp345-355","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, MULTIDISCIPLINARY","Score":null,"Total":0}
On prognosis of variation of properties of multilayer structure by preliminary processing of the substrate
In this paper, we analyze the effect of the preliminary processing of substrate on the properties of the grown heterostructure. It has been shown that the growth of an epitaxial layer on a buffer layer after preliminary (before starting of growth) annealing makes it possible to decrease the value of mismatch-induced stress. An analytical approach has been introduced for the analysis of mass and heat transfer in a multilayer structure with account mismatch-induced stress.
期刊介绍：
International Journal of Advances in Engineering Sciences and Applied Mathematics will be a thematic journal, where each issue will be dedicated to a specific area of engineering and applied mathematics. The journal will accept original articles and will also publish review article that summarize the state of the art and provide a perspective on areas of current research interest.Articles that contain purely theoretical results are discouraged.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
