机械搅拌对多晶硅定向凝固坩埚溶解速率和杂质分布的影响

A. Popescu, D. Vizman
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摘要

摘要:采用STHAMAS3D软件进行三维随时间的数值模拟,研究不同扩散系数下机械搅拌诱导的强制对流对多晶硅(mc-Si)熔体坩埚溶解速率和杂质分布的影响。在坩埚尺寸为38x38x40cm3的中试炉上进行了数值模拟。用于局部三维模拟的计算域包括熔体和晶体。溶解速率是通过一定时间后硅熔体中杂质的总质量来估计的。结果表明,机械搅拌器产生的对流增强可显著提高熔体的溶解速率,并使熔体中杂质分布均匀。
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Influence of Mechanical Stirring on the Crucible Dissolution Rate and Impurities Distribution in Directional Solidification of Multicrystalline Silicon
Abstract In this study, time dependent three-dimensional numerical simulations were carried out using the STHAMAS3D software in order to understand the effects of forced convection induced by mechanical stirring of the melt, on the crucible dissolution rate and on the impurities distribution in multicrystalline silicon (mc-Si) melt for different values of the diffusion coefficient. Numerical simulations were performed on a pilot scale furnace with crucible dimensions of 38x38x40cm3. The computational domain used for the local 3D-simulations consists of melt and crystal. The dissolution rate was estimated from the total mass of impurities that was found in the silicon melt after a certain period of time. The obtained results show that enhanced convection produced by a mechanical stirrer leads to a significant increase of the dissolution rate and also to a uniform distribution of impurities in the melt.
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