Flexible Electronics Technologies for the Fabrication of Surface Dielectric Barrier Discharge Devices

Flexible electronics have been extensively studied for the development of flexible displays and semiconductor devices. Heterojunction and patterning techniques between metal and polymer have been studied to realize complicated electrode wiring.[1] Flexible electronics technologies can also be used to fabricate devices for surface dielectric barrier discharge (SDBD). Recently, SDBD were developed as a flexible device based on polymer dielectric substrates.[2] The flexible devices using polymer dielectrics have technical issues such as bonding between metal electrodes and polymer substrates, patterning of metal electrodes, and suppression of polymer deformation by plasma generated radicals. In this presentation, we report the result of SDBD device fabricated by printed electronics technologies. For example, the SDBD devices based on the polyimide substrate with the patterned electrode by printing method showed stable discharge characteristics with a dielectric thickness of 100 micrometers or less, a sinusoidal frequency of 5-10 kHz, and a discharge voltage of 2 kV.

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Figure 1. SDBD device fabricated on polyimide substrates (left), and discharge image (right)