{"title":"22纳米及以上CMOS技术的挑战","authors":"Ru Huang, Hanming Wu, Jinfeng Kang, Deyuan Xiao, XueLong Shi, X. An, Yu Tian, Runsheng Wang, Liangliang Zhang, Xing Zhang, Yangyuan Wang","doi":"10.1007/s11432-009-0167-9","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":49124,"journal":{"name":"Science in China, Series F: Information Sciences","volume":"50 1","pages":"1491-1533"},"PeriodicalIF":0.0000,"publicationDate":"2009-09-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"43","resultStr":"{\"title\":\"Challenges of 22 nm and beyond CMOS technology\",\"authors\":\"Ru Huang, Hanming Wu, Jinfeng Kang, Deyuan Xiao, XueLong Shi, X. An, Yu Tian, Runsheng Wang, Liangliang Zhang, Xing Zhang, Yangyuan Wang\",\"doi\":\"10.1007/s11432-009-0167-9\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":49124,\"journal\":{\"name\":\"Science in China, Series F: Information Sciences\",\"volume\":\"50 1\",\"pages\":\"1491-1533\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2009-09-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"43\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Science in China, Series F: Information Sciences\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1007/s11432-009-0167-9\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Science in China, Series F: Information Sciences","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1007/s11432-009-0167-9","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}