研究了工作条件对阴极石墨氩等离子体辉光放电Te和ne的影响

Abdulhussain A. khadayeir, Falah H. yousif
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引用次数: 0

摘要

本研究采用光谱分析技术,利用两条谱线之间的比值法计算氩气的电子温度和密度。这些参数是在不同压力(0.375、0.75、1.5、1.875、2.25 torr)和电压(240、250、260、270、280伏)下计算的。结果表明:电子温度随电压升高而升高,随压力升高而降低;电子密度随电压和压力升高而升高;其中,电子的温度在(0.28 ~ 0.54eV)范围内,电子的密度在(1.5 × 1012 ~ 3.7 × 1012 cm - 3)范围内。
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Investigation the effect of operating conditions on Te and ne of Argon plasma glow discharge at cathode graphite
In this study, the spectral analysis technique was used to calculate the electron temperature and density of argon gas using the ratio method between the two spectral lines. These parameters were calculated at different pressures (0.375, 0.75, 1.5, 1.875, 2.25 torr) and voltages (240, 250, 260, 270, 280 volt). The results showed that the temperature of the electron increases by increasing the voltage and decreases with increasing pressure, while the density of the electrons increases by increasing the voltage and the pressure.  where the temperature of the electrons was calculated  and it was at the limitations of (0.28 - 0.54eV), As for the density of electrons was at the limitations of (1.5 × 1012 - 3.7 × 1012 cm – 3) .
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