使用非热参数(半导体生长)控制炉膛

G. R. Duffill, D. Dunstan
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引用次数: 0

摘要

传统上,炉子是通过测量温度和处理数据来控制的,例如,一个三段式温度控制器。作者报告了使用直接从被加热物体获取的非热数据成功控制炉子。在石英管中生长砷化镓的水平Bridgmann系统的模拟中,样品管的膨胀提供了三项控制器的积分项。
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Furnace control using non-thermal parameters (semiconductor growth)
Conventionally, furnaces are controlled by measuring the temperature and processing the data by, for example, a three-term temperature controller. The authors report successful control of a furnace using non-thermal data taken directly from the heated object. The expansion of a sample tube, in a simulation of a horizontal Bridgmann system for growing GaAs in a quartz tube, provided the integral term of a three-term controller.
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