{"title":"使用非热参数(半导体生长)控制炉膛","authors":"G. R. Duffill, D. Dunstan","doi":"10.1088/0022-3735/22/8/016","DOIUrl":null,"url":null,"abstract":"Conventionally, furnaces are controlled by measuring the temperature and processing the data by, for example, a three-term temperature controller. The authors report successful control of a furnace using non-thermal data taken directly from the heated object. The expansion of a sample tube, in a simulation of a horizontal Bridgmann system for growing GaAs in a quartz tube, provided the integral term of a three-term controller.","PeriodicalId":16791,"journal":{"name":"Journal of Physics E: Scientific Instruments","volume":"10 1","pages":"617-618"},"PeriodicalIF":0.0000,"publicationDate":"1989-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Furnace control using non-thermal parameters (semiconductor growth)\",\"authors\":\"G. R. Duffill, D. Dunstan\",\"doi\":\"10.1088/0022-3735/22/8/016\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Conventionally, furnaces are controlled by measuring the temperature and processing the data by, for example, a three-term temperature controller. The authors report successful control of a furnace using non-thermal data taken directly from the heated object. The expansion of a sample tube, in a simulation of a horizontal Bridgmann system for growing GaAs in a quartz tube, provided the integral term of a three-term controller.\",\"PeriodicalId\":16791,\"journal\":{\"name\":\"Journal of Physics E: Scientific Instruments\",\"volume\":\"10 1\",\"pages\":\"617-618\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1989-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Physics E: Scientific Instruments\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1088/0022-3735/22/8/016\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Physics E: Scientific Instruments","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1088/0022-3735/22/8/016","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Furnace control using non-thermal parameters (semiconductor growth)
Conventionally, furnaces are controlled by measuring the temperature and processing the data by, for example, a three-term temperature controller. The authors report successful control of a furnace using non-thermal data taken directly from the heated object. The expansion of a sample tube, in a simulation of a horizontal Bridgmann system for growing GaAs in a quartz tube, provided the integral term of a three-term controller.