{"title":"基于改进注意机制的晶圆图缺陷模式检测方法","authors":"Shouhong Chen, Meiqi Liu, Xingna Hou, Ziren Zhu, Zhentao Huang, Tao Wang","doi":"10.2139/ssrn.4341589","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":12115,"journal":{"name":"Expert Syst. Appl.","volume":"52 1","pages":"120544"},"PeriodicalIF":0.0000,"publicationDate":"2023-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Wafer map defect pattern detection method based on improved attention mechanism\",\"authors\":\"Shouhong Chen, Meiqi Liu, Xingna Hou, Ziren Zhu, Zhentao Huang, Tao Wang\",\"doi\":\"10.2139/ssrn.4341589\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":12115,\"journal\":{\"name\":\"Expert Syst. Appl.\",\"volume\":\"52 1\",\"pages\":\"120544\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-05-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Expert Syst. Appl.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.2139/ssrn.4341589\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Expert Syst. Appl.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.2139/ssrn.4341589","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4