Graphene microfabrication for developing mm-wave and THz devices

This paper investigates the microfabrication process of graphene in developing high frequency, particularly millimeter-wave and terahertz, electronic devices. We consider graphene production, transfer, fabrication and electrical characterization. Preliminary results reveal key insights including the benefit of polymer removal in transferring graphene to substrates as well as identifying Ar ion beam etching as being effective in patterning graphene thin films. This work lays a solid foundation in developing a holistic and reliable method to pattern graphene for use in high frequency electronics components.