热离子发射还是隧穿?理想肖特基反漏电流的通用过渡电场:以β- ga2o3为例

Wenshen Li, K. Nomoto, D. Jena, H. Xing
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引用次数: 17

摘要

随着表面电场的增加,通过肖特基势垒的反向泄漏电流从热离子发射为主转变为势垒隧穿为主。在本研究中,我们用数值反漏模型计算了$\beta$-Ga$_{2}$O$_{3}$中这种跃迁电场($E_{\rm T}$)。我们发现$E_{\rm T}$对掺杂浓度和势垒高度的依赖性非常弱,因此具有近似普遍的温度依赖性,可以用简单的经验表达式Ga$_{2}$O$_{3}$给出。借助场极板设计,我们实验观察到Ga$_{2}$O$_{3}$肖特基势垒二极管具有接近理想的体反漏特性,这与我们的数值模型吻合得很好,证实了过渡区的存在。在过渡电场附近,应同时考虑热离子发射和势垒隧穿。该研究为$\beta$-Ga$_{2}$O$_{3}$肖特基势垒二极管理想反漏特性的精确设计和建模提供了重要指导。
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Thermionic emission or tunneling? The universal transition electric field for ideal Schottky reverse leakage current: A case study inβ-Ga2O3
The reverse leakage current through a Schottky barrier transitions from a thermionic-emission dominated regime to a barrier-tunneling dominated regime as the surface electric field increases. In this study, we evaluate such transition electric field ($E_{\rm T}$) in $\beta$-Ga$_{2}$O$_{3}$ using a numerical reverse leakage model. $E_{\rm T}$ is found to have very weak dependence on the doping concentration and barrier height, thus a near-universal temperature dependence suffices and is given by a simple empirical expression in Ga$_{2}$O$_{3}$. With the help of a field-plate design, we observed experimentally in Ga$_{2}$O$_{3}$ Schottky barrier diodes a near-ideal bulk reverse leakage characteristics, which matches well with our numerical model and confirms the presence of the transition region. Near the transition electric field, both thermionic emission and barrier tunneling should be considered. The study provides important guidance toward accurate design and modeling of ideal reverse leakage characteristics in $\beta$-Ga$_{2}$O$_{3}$ Schottky barrier diodes.
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