光电子器件用透明导电CdS薄膜的合成

IF 0.1 0 THEATER Teatro e Storia Pub Date : 2005-12-19 DOI:10.1109/SMICND.2005.1558736
F. Iacomi, M. Purica, E. Budianu, D. Macovei
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引用次数: 5

摘要

采用真空热蒸发混合粉末制备了Mn、Sb和Se掺杂CdS薄膜。XRD, AFM,光谱学和电学测量研究了沉积在玻璃和硅片衬底上的薄膜。薄膜具有织构六角形结构,在723 K下热处理后变得全透明,反射率低。掺杂Sb和Se的CdS薄膜具有较高的导电性。
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Synthesis of the transparent and conductive CdS thin films for optoelectronic devices applications
The Mn, Sb and Se doped CdS thin films have been prepared using vacuum thermally evaporated mixed powders. XRD, AFM, optical spectroscopy and electrical measurements investigated the films deposited onto glass and silicon wafer substrates. The thin films have a textured hexagonal structure and after a heat treatment at 723 K become all transparent and have a low reflectivity. The CdS thin films doped with Sb and Se perform a relatively high electrical conductivity.
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Teatro e Storia
Teatro e Storia THEATER-
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