K. Aouadi, C. Nouveau, A. Besnard, B. Tlili, M. Chafra
{"title":"衬底偏压对CrN涂层组织和摩擦学性能的影响","authors":"K. Aouadi, C. Nouveau, A. Besnard, B. Tlili, M. Chafra","doi":"10.3166/ACSM.40.9-15","DOIUrl":null,"url":null,"abstract":"Microstructure, wear and friction coefficient of cr-based magnetron sputtered layers. CrN films were deposited on stainless steel and silicon substrates via magnetron reactive sputtering under a systematic variation of the substrate bias voltage. The influence of the substrate bias voltage on the structural and tribological properties of the films was investigated. The results indicated that increasing the negative bias voltage have many influence on the characteristic of the coatings: concerning their microstructure, we observed that the grain size increased, while their coefficient of friction is influenced by the bias voltage like the wear rate.","PeriodicalId":7897,"journal":{"name":"Annales De Chimie-science Des Materiaux","volume":"434 1","pages":"9-15"},"PeriodicalIF":0.6000,"publicationDate":"2016-06-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Effect of substrate bias voltage on the microstructure and tribological properties of CrN coatings\",\"authors\":\"K. Aouadi, C. Nouveau, A. Besnard, B. Tlili, M. Chafra\",\"doi\":\"10.3166/ACSM.40.9-15\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Microstructure, wear and friction coefficient of cr-based magnetron sputtered layers. CrN films were deposited on stainless steel and silicon substrates via magnetron reactive sputtering under a systematic variation of the substrate bias voltage. The influence of the substrate bias voltage on the structural and tribological properties of the films was investigated. The results indicated that increasing the negative bias voltage have many influence on the characteristic of the coatings: concerning their microstructure, we observed that the grain size increased, while their coefficient of friction is influenced by the bias voltage like the wear rate.\",\"PeriodicalId\":7897,\"journal\":{\"name\":\"Annales De Chimie-science Des Materiaux\",\"volume\":\"434 1\",\"pages\":\"9-15\"},\"PeriodicalIF\":0.6000,\"publicationDate\":\"2016-06-28\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Annales De Chimie-science Des Materiaux\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.3166/ACSM.40.9-15\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Annales De Chimie-science Des Materiaux","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.3166/ACSM.40.9-15","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
Effect of substrate bias voltage on the microstructure and tribological properties of CrN coatings
Microstructure, wear and friction coefficient of cr-based magnetron sputtered layers. CrN films were deposited on stainless steel and silicon substrates via magnetron reactive sputtering under a systematic variation of the substrate bias voltage. The influence of the substrate bias voltage on the structural and tribological properties of the films was investigated. The results indicated that increasing the negative bias voltage have many influence on the characteristic of the coatings: concerning their microstructure, we observed that the grain size increased, while their coefficient of friction is influenced by the bias voltage like the wear rate.
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The ACSM is concerning the cutting-edge innovations in solid material science. The journal covers a broad spectrum of scientific fields, ranging all the way from metallurgy, semiconductors, solid mineral compounds, organic macromolecular compounds to composite materials. The editorial board encourages the submission of original papers that deal with all aspects of material science, including but not limited to synthesis and processing, property characterization, reactivity and reaction kinetics, evolution in service, and recycling. The papers should provide new insights into solid materials and make a significant original contribution to knowledge.
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