低温PECVD在砷化镓上直接生长晶体硅:III-V/Si串联电池的混合隧道结

G. Hamon, J. Decobert, N. Vaissière, R. Lachaume, R. Cariou, W. Chen, J. Alvarez, N. Habka, J. Kleider, P. Roca i Cabarrocas
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引用次数: 1

摘要

III-V和Si的单片集成是生产具有高转换效率的串联太阳能电池的强烈兴趣。在法国ANR研究项目推动力的背景下,研究了III-V/Si多结太阳能电池的创新方法。目标器件是由III-V顶电池(AlGaAs)和IV底电池(Si1-xGex)组成的串联电池。选择AlyGa1-yAs作为顶层材料是合理的,因为它提供了与Si1-xGex (1.63 eV/0.96 eV)的最佳带隙组合,对于这种串联配置,理论效率超过42%。在我们的反向变质方法中,我们首先使用MOVPE在晶格匹配的GaAs衬底上生长AlGaAs顶部电池,然后在顶部进行低温PECVD异质外延SiGe。我们在这里展示了Si(PECVD)/III-V(MOVPE)界面的第一个结构和电特性。此外,通过低温PECVD在GaAs上外延生长高掺杂晶体Si,使我们能够制造具有低电阻率和大电流的杂化隧道结,适用于串联III-V/Si太阳能电池中的两个亚电池互连。
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Direct growth of crystalline silicon on GaAs by low temperature PECVD: Towards hybrid tunnel junctions for III-V/Si tandem cells
Monolithical integration of III-V and Si is of strong interest to produce tandem solar cells reaching high conversion efficiencies. In the context of the French ANR research project IMPETUS, an innovative approach for III-V/Si multijunction solar cells is studied. The targeted device is a tandem cell composed of a III-V top cell (AlGaAs) and a IV bottom cell (Si1-xGex). The choice of AlyGa1-yAs as the top material is justified because it provides the optimum bandgap combination with Si1-xGex (1.63 eV/0.96 eV), with theoretical efficiencies in excess of 42% for such a tandem configuration. In our inverted metamorphic approach, we first use MOVPE to grow the AlGaAs top cell on a lattice matched GaAs substrate, and then perform low temperature PECVD heteroepitaxial SiGe on top. We show here the first structural and electrical characterizations of Si(PECVD)/III-V(MOVPE) interfaces. Furthermore, the epitaxial growth of highly doped crystalline Si by low-temperature PECVD on GaAs enables us to fabricate hybrid tunnel junctions with low resistivity and a high current, suitable to interconnect the two subcells in the tandem III-V/Si solar cell.
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