C. Waits, Nicholas R. Jankowski, B. Geil, R. Ghodssi
{"title":"使用集成球轴承和空气涡轮的MEMS旋转驱动器","authors":"C. Waits, Nicholas R. Jankowski, B. Geil, R. Ghodssi","doi":"10.1109/SENSOR.2007.4300334","DOIUrl":null,"url":null,"abstract":"The first silicon air-driven rotary actuation mechanism based on encapsulated ball bearings is reported. The method of integrating a silicon air turbine with a ball bearing support mechanism has been developed for silicon turbomachinery and tribological investigations. Rotational speeds up to 37,000 rpm and continuous operation longer than 24 hours were measured. Qualitative analysis is also presented, shedding light on silicon/ball wear and methods for increasing bearing lifetime and speeds.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"11","resultStr":"{\"title\":\"MEMS Rotary Actuator using an Integrated Ball Bearing and Air Turbine\",\"authors\":\"C. Waits, Nicholas R. Jankowski, B. Geil, R. Ghodssi\",\"doi\":\"10.1109/SENSOR.2007.4300334\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The first silicon air-driven rotary actuation mechanism based on encapsulated ball bearings is reported. The method of integrating a silicon air turbine with a ball bearing support mechanism has been developed for silicon turbomachinery and tribological investigations. Rotational speeds up to 37,000 rpm and continuous operation longer than 24 hours were measured. Qualitative analysis is also presented, shedding light on silicon/ball wear and methods for increasing bearing lifetime and speeds.\",\"PeriodicalId\":23295,\"journal\":{\"name\":\"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2007-06-10\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"11\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SENSOR.2007.4300334\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SENSOR.2007.4300334","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
MEMS Rotary Actuator using an Integrated Ball Bearing and Air Turbine
The first silicon air-driven rotary actuation mechanism based on encapsulated ball bearings is reported. The method of integrating a silicon air turbine with a ball bearing support mechanism has been developed for silicon turbomachinery and tribological investigations. Rotational speeds up to 37,000 rpm and continuous operation longer than 24 hours were measured. Qualitative analysis is also presented, shedding light on silicon/ball wear and methods for increasing bearing lifetime and speeds.
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