N. Didier, B. Chenevier, O. Thomas, J. Sénateur, F. Weiss, A. Gaskov
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引用次数: 0
摘要
采用金属有机化学气相沉积(MOCVD)技术沉积了[(YBaCuO) m /(PrBaCuO) n] 10多层膜。薄膜生长在srtio3(100)和MgO(100)衬底上,其c轴垂直于衬底。在不同的沉积温度(700 ~ 850℃)和不同的调制下合成了一系列的超晶格(YBCO层的厚度保持不变,等于100A)。用二次中性质谱(SNMS)测定了界面和相互扩散处的元素浓度谱。x射线衍射在001和002反射附近显示卫星峰(超晶格调制的特征)。此外,样品具有良好的面内取向。用交流筛选法对其超导性能进行了分析。当m=8和n=2 (n和m分别为YBCO层和PBCO层沿c轴的单位胞数)时,临界温度达到88K。
Growth of (YBaCuO)m/(PrBaCuO)n Superlattices by MOCVD
[(YBaCuO) m /(PrBaCuO) n ] 10 multilayers have been deposited by Metal Organic Chemical Vapor Deposition (MOCVD). The films grow on SrTiO 3 (100) and MgO (100) substrates and have c-axis perpendicular to the substrate. A serie of superlattices has been synthesised with different deposition temperatures ranging between 700 and 850°C with different modulations (the thickness of YBCO layers staying unchanged and equal to 100A). The elements concentrations profiles at the interfaces and the interdiffusion were determined by secondary neutral mass spectroscopy (SNMS). X-ray diffraction show satellite peaks (characteristic of superlattice modulation) around 001 and 002 reflections. Moreover, the samples show a good in-plane orientation. The superconducting properties are analysed by AC screening. The critical temperature reaches 88K in the case of m=8 and n=2 (n and m being the numbers of units cells along c-axis for YBCO layer and PBCO one respectively).