Structural-phase state of the Zr-Y-O layer in the Zr-Y-O/Si Al-N coating at long annealing using «in-situ» observation

TEM research of the structure of the multilayered coatings consisting of the alternating Si-Al-N and Zr-Y-O layers an equal thickness was carried out. The Zr-Y-O layers in the Zr-Y-O / Si-Al-N multilayer coating have a columnar structure, the diameter of a column reaches 80 nm, the column height is about 1000 nm, which, in this case, corresponds to the thickness of the deposited layer. The structure of the Si-Al-N layers is amorphous. High temperature annealing at 900 °С for 20-120 min leads to a change in the structural-phase state. The untransformable t’ phase appears at a temperature of 900 °С after a 20 minute exposure, the grain size reaches its maximal value after a 70 minute exposure and does not change further.TEM research of the structure of the multilayered coatings consisting of the alternating Si-Al-N and Zr-Y-O layers an equal thickness was carried out. The Zr-Y-O layers in the Zr-Y-O / Si-Al-N multilayer coating have a columnar structure, the diameter of a column reaches 80 nm, the column height is about 1000 nm, which, in this case, corresponds to the thickness of the deposited layer. The structure of the Si-Al-N layers is amorphous. High temperature annealing at 900 °С for 20-120 min leads to a change in the structural-phase state. The untransformable t’ phase appears at a temperature of 900 °С after a 20 minute exposure, the grain size reaches its maximal value after a 70 minute exposure and does not change further.