利用ZnO-CuO-ZnO/Si结构沉积激光诱导等离子体技术制造齐纳二极管

S. K. Mustafa
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引用次数: 0

摘要

本文采用激光诱导等离子体技术制备ZnO-CuO-ZnO/Si异质结结构的齐纳二极管。采用不同脉冲数制备了6个样品,分别以200 ~ 600个脉冲在ZnO片上,以300个脉冲固定在CuO片上。采用ZnO片沉积的激光脉冲能量为900mJ,采用CuO片沉积的激光脉冲能量为600mJ。以多孔硅为衬底制备的薄膜均表现出良好的齐纳二极管性能。
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Manufacturing Zener diode using ZnO-CuO-ZnO/Si structures deposited laser induced plasma technique
        In this paper Zener diode was manufactured using ZnO-CuO-ZnO/Si heterojunction structure that used laser induced plasma technique to prepare the nanofilms. Six samples were prepared with a different number of laser pulses, started with 200 to 600 pulses on ZnO tablet with fixed the number of laser pulses on CuO tablet at 300 pulses. The pulse energy of laser deposited was 900mJ using ZnO tablet and 600mJ using CuO tablet. All prepared films shown good behavior as Zener diode when using porous silicon as substrate.
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