{"title":"一种新型高谐波成像AFM探针的设计与测试,该探针具有用于谐波放大的专用第二悬臂","authors":"B. Zeyen, K. Turner","doi":"10.1109/SENSOR.2007.4300440","DOIUrl":null,"url":null,"abstract":"We report on design, fabrication and initial testing of a new higher harmonic imaging atomic force microscopy (AFM) probe for the characterization of materials at the nanoscale. In contrast to previous designs, this probe employs a dedicated second cantilever not only to amplify the desired higher harmonic, but also to suppress the actuation movement. With these measures the amplitudes of the actuation and the higher harmonic are brought closer together on the second cantilever, which is very advantageous for single-channel readout applications.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"48 1","pages":"1545-1548"},"PeriodicalIF":0.0000,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Design and Test of a Novel Higher Harmonic Imaging AFM Probe with a Dedicated Second Cantilever for Harmonic Amplification\",\"authors\":\"B. Zeyen, K. Turner\",\"doi\":\"10.1109/SENSOR.2007.4300440\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We report on design, fabrication and initial testing of a new higher harmonic imaging atomic force microscopy (AFM) probe for the characterization of materials at the nanoscale. In contrast to previous designs, this probe employs a dedicated second cantilever not only to amplify the desired higher harmonic, but also to suppress the actuation movement. With these measures the amplitudes of the actuation and the higher harmonic are brought closer together on the second cantilever, which is very advantageous for single-channel readout applications.\",\"PeriodicalId\":23295,\"journal\":{\"name\":\"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference\",\"volume\":\"48 1\",\"pages\":\"1545-1548\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2007-06-10\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SENSOR.2007.4300440\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SENSOR.2007.4300440","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Design and Test of a Novel Higher Harmonic Imaging AFM Probe with a Dedicated Second Cantilever for Harmonic Amplification
We report on design, fabrication and initial testing of a new higher harmonic imaging atomic force microscopy (AFM) probe for the characterization of materials at the nanoscale. In contrast to previous designs, this probe employs a dedicated second cantilever not only to amplify the desired higher harmonic, but also to suppress the actuation movement. With these measures the amplitudes of the actuation and the higher harmonic are brought closer together on the second cantilever, which is very advantageous for single-channel readout applications.