含中间活性金属层的碳化硅与无氧铜的摩擦键合

A. Nishimoto, M. Ando, M. Takahashi, M. Aritoshi, K. Ikeuchi
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引用次数: 5

摘要

在无压烧结碳化硅(SiC)与无氧铜(Cu)的摩擦结合中,应用了从活性金属到贵金属的各种金属中间层,并通过TEM观察系统地研究了它们对结合强度和接头显微组织的影响。采用活性金属(Al、Ti、Zr或Nb)薄膜作为中间层,SiC与Cu的结合强度显著提高。相反,当施加Fe、Ni或Ag中间层时,在不施加外载荷的情况下,SiC试样在键合操作后立即从Cu试样中分离出来,类似于没有中间层的键合情况。在与活性金属中间层的摩擦键合过程中,中间层与Cu - lo机械混合形成一个非常复杂的微观结构,延伸到几个100 μm的区域,TEM观察显示,在SiC和活性金属之间形成了非常薄的反应层。当Ti中间层加入后,沿界面几乎整个区域形成了一层10 ~ 30nm厚的TiC层,并且在该层与SiC基体之间形成了一层极薄的Cu固溶体。在TiC层的另一侧,部分观察到厚度约100 nm的Ti 5 Si 3层。当施加Nb或Zr中间层时,除了Nb 5 Si 3、NbC和ZrC的反应层外,还观察到Nb或Zr显著富集的极薄界面层。这些界面层具有比扩散焊和钎焊界面层更小的厚度和更细的晶粒尺寸。除了上述层外,偶尔还观察到非晶氧化硅层,这表明活性金属增强了SiC表面氧化膜的去除。
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Friction Bonding of Silicon Carbide to Oxygen-Free Copper with an Intermediate Layer of Reactive Metal
Intermediate layers of various metals ranging from reactive metals to noble metals have been applied to friction bonding of SiC (pressureless-sintered silicon carbide) to Cu (oxygen-free copper), and their influences on the bond strength and microstructures of the joint have been systematically investigated by means of TEM observations. When a thin foil of reactive metal, Al, Ti, Zr, or Nb, was applied as the intermediate layer, the bond strength of SiC to Cu was improved considerably. In contrast, when an intermediate layer of Fe, Ni, or Ag was applied, the SiC specimen separated from the Cu specimen immediately after the bonding operation without the application of external load, similar to the case of bonding without an intermediate layer. During friction bonding with an intermediate layer of reactive metal, the intermediate layer was mechanically mixed with Cu lo form a very complicated microstructure extending over a region as wide as a few 100 μm TEM observations have revealed that very thin reaction layers between the SiC and reactive metals were formed. When the Ti intermediate layer was applied, a TiC layer 10-30 nm thick was formed over almost the entire area along the interface, and between this layer and the SiC matrix a very thin layer of a Cu solid solution was detected. On the other side of the TiC layer, a Ti 5 Si 3 layer ∼100 nm thick was partially observed. When the Nb or Zr intermediate layer was applied, a very thin interfacial layer, in which Nb or Zr was significantly concentrated, was observed in addition to the reaction layers of Nb 5 Si 3 , NbC, and ZrC. These interfacial layers can he characterized by their much smaller thickness and finer grain size than those observed in diffusion-bonded and brazed joints. Apart from the layers mentioned above, amorphous silicon oxide layers were occasionally observed, suggesting that the reactive metal enhanced the removal of the oxide film on the SiC surface.
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