{"title":"超高灵敏度槽式微环谐振器声传感器的设计","authors":"Xiaoxia Chu, Jiangong Cui, Min Zhu, Rongyu Zhao, Wendong Zhang, Guojun Zhang, Renxin Wang, Yuhua Yang, Yongfeng Ren","doi":"10.1080/01468030.2022.2145529","DOIUrl":null,"url":null,"abstract":"ABSTRACT A slot microring resonator acoustic sensor (MRAS) using the PDMS package was proposed to achieve ultra-high sensitivity acoustic detection. The acoustic detection principle of the sensor is analyzed theoretically, the structural parameters are optimized and the performance of the sensor is verified by simulation. The simulation results show that the proposed slot MRAS has a high-quality factor of 1.49 × 106, the sensitivity of the sensor by intensity detection method is up to 3872 mV/kPa, and the 3 dB bandwidth is 210 MHz. The sensor designed in this paper has the advantages of ultra-high sensitivity and wide bandwidth range, which has important value in the field of acoustic detection.","PeriodicalId":50449,"journal":{"name":"Fiber and Integrated Optics","volume":"445 1","pages":"83 - 95"},"PeriodicalIF":2.3000,"publicationDate":"2022-07-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Design of Ultra-High Sensitivity Slot Micro-ring Resonator Acoustic Sensor\",\"authors\":\"Xiaoxia Chu, Jiangong Cui, Min Zhu, Rongyu Zhao, Wendong Zhang, Guojun Zhang, Renxin Wang, Yuhua Yang, Yongfeng Ren\",\"doi\":\"10.1080/01468030.2022.2145529\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"ABSTRACT A slot microring resonator acoustic sensor (MRAS) using the PDMS package was proposed to achieve ultra-high sensitivity acoustic detection. The acoustic detection principle of the sensor is analyzed theoretically, the structural parameters are optimized and the performance of the sensor is verified by simulation. The simulation results show that the proposed slot MRAS has a high-quality factor of 1.49 × 106, the sensitivity of the sensor by intensity detection method is up to 3872 mV/kPa, and the 3 dB bandwidth is 210 MHz. The sensor designed in this paper has the advantages of ultra-high sensitivity and wide bandwidth range, which has important value in the field of acoustic detection.\",\"PeriodicalId\":50449,\"journal\":{\"name\":\"Fiber and Integrated Optics\",\"volume\":\"445 1\",\"pages\":\"83 - 95\"},\"PeriodicalIF\":2.3000,\"publicationDate\":\"2022-07-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Fiber and Integrated Optics\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.1080/01468030.2022.2145529\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"OPTICS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Fiber and Integrated Optics","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1080/01468030.2022.2145529","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"OPTICS","Score":null,"Total":0}
Design of Ultra-High Sensitivity Slot Micro-ring Resonator Acoustic Sensor
ABSTRACT A slot microring resonator acoustic sensor (MRAS) using the PDMS package was proposed to achieve ultra-high sensitivity acoustic detection. The acoustic detection principle of the sensor is analyzed theoretically, the structural parameters are optimized and the performance of the sensor is verified by simulation. The simulation results show that the proposed slot MRAS has a high-quality factor of 1.49 × 106, the sensitivity of the sensor by intensity detection method is up to 3872 mV/kPa, and the 3 dB bandwidth is 210 MHz. The sensor designed in this paper has the advantages of ultra-high sensitivity and wide bandwidth range, which has important value in the field of acoustic detection.
期刊介绍：
Fiber and Integrated Optics , now incorporating the International Journal of Optoelectronics, is an international bimonthly journal that disseminates significant developments and in-depth surveys in the fields of fiber and integrated optics. The journal is unique in bridging the major disciplines relevant to optical fibers and electro-optical devices. This results in a balanced presentation of basic research, systems applications, and economics. For more than a decade, Fiber and Integrated Optics has been a valuable forum for scientists, engineers, manufacturers, and the business community to exchange and discuss techno-economic advances in the field.
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