太赫兹天线用硅微加工微透镜阵列

2011 International Conference on Infrared, Millimeter, and Terahertz Waves Pub Date : 2011-12-15 DOI:10.1109/IRMMW-THZ.2011.6104856

Choonsup Lee, N. Llombart, C. Jung, G. Chattopadhyay, I. Mehdi

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引用次数: 3

摘要

我们利用硅微加工技术开发了一种用于硅基太赫兹天线阵列的5 × 5硅微透镜阵列。硅微加工技术的特点使人们能够在一片硅片上一次微加工出数量无限且均匀性良好的微透镜阵列。该技术将解决太赫兹相机在探测器阵列中集成天线的关键问题。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Silicon micromachined microlens array for THz antenna

We have developed a 5 × 5 silicon microlens array using silicon micromachining technique for silicon based THz antenna array. The feature of silicon micromachining technique enables one to microfabricate unlimited number of microlens arrays at one time with good uniformity on a silicon wafer. This technique will resolve one of the key issues in building THz camera which is to integrate antennas in detector array.

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2011 International Conference on Infrared, Millimeter, and Terahertz Waves

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