{"title":"多通道化学传感器采用表面声波装置","authors":"T. Nomura, A. Saitoh, S. Furukawa","doi":"10.1109/ULTSYM.1997.663053","DOIUrl":null,"url":null,"abstract":"Multi-channel SAW chemical sensor is used as an analytical system for organic gas detection. SAW sensors show a high frequency property, and can become multi-channel devices on a substrate. The features improve sensor sensitivity and enable integration of the sensor. In this paper, we propose a new chemical sensor system using multi-channel SAW devices. A four channel SAW delay line was designed and fabricated on one piezoelectric substrate. Each channel was coated by a different selective organic film and the output of each channel was used to make a response pattern. The response to odorant solvents showed different analyte specific patterns.","PeriodicalId":6369,"journal":{"name":"1997 IEEE Ultrasonics Symposium Proceedings. An International Symposium (Cat. No.97CH36118)","volume":"3 1","pages":"423-426 vol.1"},"PeriodicalIF":0.0000,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Multi-channel chemical sensor using surface acoustic wave device\",\"authors\":\"T. Nomura, A. Saitoh, S. Furukawa\",\"doi\":\"10.1109/ULTSYM.1997.663053\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Multi-channel SAW chemical sensor is used as an analytical system for organic gas detection. SAW sensors show a high frequency property, and can become multi-channel devices on a substrate. The features improve sensor sensitivity and enable integration of the sensor. In this paper, we propose a new chemical sensor system using multi-channel SAW devices. A four channel SAW delay line was designed and fabricated on one piezoelectric substrate. Each channel was coated by a different selective organic film and the output of each channel was used to make a response pattern. The response to odorant solvents showed different analyte specific patterns.\",\"PeriodicalId\":6369,\"journal\":{\"name\":\"1997 IEEE Ultrasonics Symposium Proceedings. An International Symposium (Cat. No.97CH36118)\",\"volume\":\"3 1\",\"pages\":\"423-426 vol.1\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1997-10-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"1997 IEEE Ultrasonics Symposium Proceedings. An International Symposium (Cat. No.97CH36118)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ULTSYM.1997.663053\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"1997 IEEE Ultrasonics Symposium Proceedings. An International Symposium (Cat. No.97CH36118)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ULTSYM.1997.663053","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Multi-channel chemical sensor using surface acoustic wave device
Multi-channel SAW chemical sensor is used as an analytical system for organic gas detection. SAW sensors show a high frequency property, and can become multi-channel devices on a substrate. The features improve sensor sensitivity and enable integration of the sensor. In this paper, we propose a new chemical sensor system using multi-channel SAW devices. A four channel SAW delay line was designed and fabricated on one piezoelectric substrate. Each channel was coated by a different selective organic film and the output of each channel was used to make a response pattern. The response to odorant solvents showed different analyte specific patterns.
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