粗糙锌和镉多晶样品的椭偏研究

Mohamed Abdelnaby, Sobhy Ebrahim, M. Osman, N. Nagib
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引用次数: 0

摘要

构造了一个手动零椭偏仪,测定了不同表面粗糙度的锌和镉在波长632.8 nm、入射角45°和室温下的光学常数。所研究的样品是厚度~ 0.05 mm,表面积30 mm × 30 mm的多晶片。用不同粒度的金刚石膏对样品进行机械抛光。最后对样品进行0.5 μm、2.5 μm、5 μm、10 μm和14 μm的抛光处理。得到了椭偏参数ψ和Δ,并用它们计算了光学常数n(折射率)和k(消光系数)。结果表明,随着粗糙度的增大,折射率n增大,消光系数k减小。介绍了椭偏测量所用的光学排列,并说明了提取结果的步骤。计算结果中的不确定度并将其包含在结果中。
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Ellipsometric studies on rough Zn and Cd polycrystalline samples
A manual null ellipsometer is constructed and used to determine the optical constants of zinc and cadmium of different surface roughness at the wavelength 632.8 nm, angle of incidence 45° and room temperature. The studied samples are polycrystalline sheets of thickness ~ 0.05 mm and surface area 30 mm x 30 mm. The samples were mechanically polished using diamond paste of different grain sizes. The final stage of polishing for the samples was with pastes of grain size 0.5 μm, 2.5 μm, 5 μm, 10 μm and 14 μm. The ellipsometric parameters ψ and Δ were obtained and were used to calculate the optical constants n (refractive index) and k (extinction coefficient). It was found that as the roughness is increased, the refractive index n increases while the extinction coefficient k decreases. The used optical arrangement for ellipsometric measurements is presented and the procedure for extracting the results is explained. The uncertainty in the results is calculated and included in the results.
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