利用微机械打印头在环境压力下进行有机材料的蒸发打印

V. Leblanc, Jianglong Chen, P. Mardilovich, V. Bulović, M. Schmidt
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引用次数: 2

摘要

我们提出了一种mems技术,用于有机材料的蒸发打印,不需要真空环境,打印速度快(1 kHz),并且可以扩展到一系列单独的可寻址喷嘴。通过直接从气相沉积材料,而不让液相与基材接触,我们旨在避免喷墨印刷有机材料时遇到的限制。MEMS打印头在硅膜上具有2微米孔阵列和集成薄膜铂加热器,用于材料的局部蒸发。该打印头与喷墨技术一起用于将材料输送到孔中,以打印分子有机半导体。我们的技术能够实现大面积有机光电子器件的印刷,因此是实现大面积、高速、低成本光电子器件印刷的关键因素。
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Evaporative Printing of Organic Materials at Ambient Pressure using a Micromachined Printhead
We present a MEMS-enabled technique for evaporative printing of organic materials which doesn't require a vacuum ambient, has a fast printing rate (1 kHz), and can be scaled up to an array of individually addressable nozzles. By depositing the materials directly from the gas phase, without liquid phase coming in contact with the substrate, we aim at avoiding the limitations encountered when ink-jet printing organic materials. The MEMS printhead comports an array of 2 micron pores and an integrated thin film platinum heater on a silicon membrane for local evaporation of the materials. This printhead was used, together with ink-jet technology for the delivery of material to the pores, to print molecular organic semiconductors. Our technique enables printing of organic optoelectronics over large areas, and is thus a critical element in the realization of large-area, high-speed, and low-cost printing of optoelectronics.
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