石英谐振器的非线性加速度灵敏度

Jianfeng Chen, Y. Yong, R. Kubena, D. Kirby, D. Chang
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引用次数: 2

摘要

研究了石英板谐振器初始应力/应变对其加速度灵敏度的非线性影响。在拉格朗日公式中,利用小变形叠加在有限初始变形上的理论建立了有限元模型。研究了AT型和sc型石英圆板谐振器。钢板分别承受直径压缩力和弯曲力。施加直径力产生的初始应变表示面内加速度产生的初始应变,施加弯曲力产生的初始应变表示面外加速度产生的初始应变。我们使用非线性初始应变的模型结果与Ballato、Mingins、Fletcher和Douglas的测量数据非常吻合。采用线性初始应变的模型结果仅对受直径力作用的板与实测数据比较好,而对受弯曲力作用的板与实测数据比较差。因此,我们的模型结果表明,为了准确地预测面外加速度灵敏度,必须使用非线性初始应变。线性初始应力/应变不能完全捕获旋转和弯曲效应。使用线性初始应变的加速度灵敏度模型只能用于面内加速度或非常低的g面外加速度。sc切割晶体的频率变化与施加弯曲力的线性关系优于at切割晶体。at切割晶体的面外加速度灵敏度的叠加原理通常是无效的,特别是在高加速度的情况下。
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Nonlinear acceleration sensitivity of quartz resonators
The nonlinear effects of initial stress/strain of the quartz plate resonator on its acceleration sensitivity was studied. Finite element models were developed using a theory of small deformations superposed on finite initial deformations in a Lagrangian formulation. AT- and SC-cut quartz circular plate resonators were studied. The plates were respectively subjected to diametrical compression force and bending force. The initial strains due to the application of diametrical force represented initial strains due to in-plane acceleration, while the initial strains due to bending force represented initial strains due to out-of-plane acceleration. Our model results using nonlinear initial strains showed good agreement with measured data by Ballato, Mingins, and Fletcher and Douglas. The model results using linear initial strains compared well only with the measured data for plates subjected to diametrical force but not for plates subjected to bending forces. Hence our model results showed that for accurate prediction of out-of-plane acceleration sensitivity the nonlinear initial strains must be used. The linear initial stress/strain cannot fully capture rotation and bending effects. The acceleration sensitivity model using linear initial strains could only be employed for in-plane acceleration, or for very low g out-of-plane acceleration. The SC-cut crystals showed better linearity of frequency change with respect to applied bending forces than the AT-cut crystals. The principle of superposition for out-of-plane acceleration sensitivity in AT-cut crystals is in general not valid, especially in cases of high g accelerations.
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