薄膜物理结构是分形的吗?

Joseph E. Yehoda, Russell Messier
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引用次数: 44

摘要

气相沉积薄膜中常见的柱状物理结构已被称为结构带模型的几种变体分类。也许这些不同模型最有趣的特点是它们普遍适用于所有的薄膜材料和沉积过程。在大范围的薄膜厚度、制备条件和材料类型上的结构自相似性似乎指向一个共同的起源。为什么薄膜可能是分形的原因将被提出,以及这一建议对理解薄膜物理结构的起源和演变的后果。特别是,最近的弹道聚合计算机模型提供了一个有前途的研究途径。
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Are thin film physical structures fractals?

The columnar physical structures commonly found in vapor-deposited thin films have been classified by several variations of what have been termed structure zone models. Perhaps the most interesting feature of these various models is their universal application to apparently all film materials and deposition processes. A structural self-similarity over a wide range of film thicknesses, preparation conditions, and materials types appear to be pointing toward a common origin. Reasons will be presented as to why thin films may be fractals and the consequence of this suggestion to understanding the origin and evolution of thin film physical structure. In particular, recent ballistic aggregation computer models provide a promising avenue of research.

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