Jung-Mu Kim, Nam-Gon Kim, Jaehyoung Park, C. Cheon, Y. Kwon, Yong-Kweon Kim
{"title":"采用射频MEMS SP3T开关进行介电常数测量的单片射频MEMS探针阵列系统","authors":"Jung-Mu Kim, Nam-Gon Kim, Jaehyoung Park, C. Cheon, Y. Kwon, Yong-Kweon Kim","doi":"10.1109/SENSOR.2007.4300217","DOIUrl":null,"url":null,"abstract":"The monolithic RF MEMS probe array system for the application of permittivity measurement was firstly proposed and implemented. The proposed system consists of RF MEMS probe array and RF MEMS SP3T(single-pole triple-throw) switches. We succeeded to show the feasibility of the system for the permittivity measurement experimentally through the permittivity measurement of liquid as operating RF MEMS switches in turn.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"42 1","pages":"663-666"},"PeriodicalIF":0.0000,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Monolithic RF MEMS Probe Array System using RF MEMS SP3T Switches for Permittivity Measurement\",\"authors\":\"Jung-Mu Kim, Nam-Gon Kim, Jaehyoung Park, C. Cheon, Y. Kwon, Yong-Kweon Kim\",\"doi\":\"10.1109/SENSOR.2007.4300217\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The monolithic RF MEMS probe array system for the application of permittivity measurement was firstly proposed and implemented. The proposed system consists of RF MEMS probe array and RF MEMS SP3T(single-pole triple-throw) switches. We succeeded to show the feasibility of the system for the permittivity measurement experimentally through the permittivity measurement of liquid as operating RF MEMS switches in turn.\",\"PeriodicalId\":23295,\"journal\":{\"name\":\"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference\",\"volume\":\"42 1\",\"pages\":\"663-666\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2007-06-10\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SENSOR.2007.4300217\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SENSOR.2007.4300217","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Monolithic RF MEMS Probe Array System using RF MEMS SP3T Switches for Permittivity Measurement
The monolithic RF MEMS probe array system for the application of permittivity measurement was firstly proposed and implemented. The proposed system consists of RF MEMS probe array and RF MEMS SP3T(single-pole triple-throw) switches. We succeeded to show the feasibility of the system for the permittivity measurement experimentally through the permittivity measurement of liquid as operating RF MEMS switches in turn.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
