利用共振信号原理监测嵌入波导的质量或体积损失:DUV210微谐振器的纳米刻槽

Doliveira Arthur, Garnier Lucas, Mahe Fabrice, Lhermite Herve, Gaviot Etienne, Beche Bruno
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摘要

本文的目的是研究直接位于物质核心结构中的微分质量损失或缺乏物质(空隙)的影响,以及通过光学频率的谐振信号表面测量其影响的可能性。为此,重点研究了微谐振器的有效指数或特征值作为相关模型的演变。用共振光信号原理测量了比缺失质量。然后,特定家族的谐振器被设计和成形,并在其上刻上纳米缝。然后,在考虑空洞的情况下,用伪周期来表征信号共振光;因此,它包含有关预定义的嵌入式卷的信息。该研究首先通过将深紫外技术控制在有机材料上以制造开槽微谐振器家族,然后评估系统有效指数的演变,该指数与自由光谱范围成反比。实验上,测量平台的设计使得测量循环谐振器内给定材料缺乏的影响成为可能。实验测量证实了先前的模拟,表明收敛范围为0.09至0.39%。因此,相关结果使我们能够验证关于空化体积(或嵌入核心波导内的质量)与空间谐振光信号的量化描述。
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Monitoring the loss of mass or the volume recessed into a waveguide by resonant signal principle: Nano-inscribed slots in DUV210 micro-resonators
The goal of this paper is to study the impact of a differential mass loss or a lack of material (void) directly located into the core structure of matter together with the possibility of measuring its effect by a resonant signal surface at optical frequencies. To this end, the focus has been on the evolution of effective indices or eigenvalues of micro-resonators as relevant models. Specific lack of mass was measured by way of a resonant optical signal principle. Then, specific families of resonators have been designed and shaped with several slits nano-inscribed upon them. The signal resonant light is then characterized by its pseudo-period while considering the whole geometry, taking account of the void; thus, it contains the information regarding the pre-defined recessed volume. The study was carried out first by controlling the deep UV technology onto an organic so as to fabricate the family of slotted micro-resonators before assessing the evolution of the effective index of the system that is inversely proportional to the free spectral range. Experimentally, the design of the measurement platform made it possible to measure the impact of a given lack of material within the cyclic resonators. Experimental measurements have been carried out so as to confirm previous simulations demonstrating a convergence ranging from 0.09 to 0.39%. Accordingly, the relevant results allow us to validate a quantified description regarding the hollowed out volume (or mass recessed within the core waveguide) with regard to the spatial resonant optical signal.
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来源期刊
International Journal of Physical Sciences
International Journal of Physical Sciences 综合性期刊-综合性期刊
自引率
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发文量
4
审稿时长
24 months
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