硅衬底上单片生长的锑基中红外半导体材料和器件

P. Carrington, E. Delli, P. Hodgson, E. Repiso, A. Craig, A. Marshall, A. Krier
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引用次数: 0

摘要

在GaSb和InAs衬底上生长的III-V型半导体异质结构广泛用于生产在技术上重要的中红外光谱范围内工作的高性能光电器件。然而,这些基板价格昂贵,只能在小尺寸和低导热性。将iii - v集成到硅衬底上提供了克服这些缺点的机会,并开辟了在片上实验室MIR光子集成电路中的新应用的可能性。然而,不寻常的III-V/Si界面和大晶格错配给外延生长带来了挑战。在这里,我们报告了利用分子束外延在硅上生长高质量sb基光电子器件的新技术。
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Antimony based mid-infrared semiconductor materials and devices monolithically grown on silicon substrates
III-V semiconductor heterostructures grown on GaSb and InAs substrates are widely used to produce high performance optoelectronic devices operating in the technologically important mid-infrared spectral range. However, these substrates are expensive, only available in small sizes and have low thermal conductivity. Integration of III-Vs onto silicon substrates offers the opportunity to overcome these shortcomings and opens the possibility of new applications in lab-on-chip MIR photonic integrated circuits. However, the unusual III-V/Si interface and large lattice mismatch presents challenges to epitaxial growth. Here, we report on novel techniques employed to grow high quality Sb-based optoelectronic devices on silicon using molecular beam epitaxy.
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