{"title":"螺旋扫描与光栅扫描在AFM成像中的相对性能","authors":"M. S. Rana, H. Pota, I. Petersen","doi":"10.1109/CEEE.2015.7428259","DOIUrl":null,"url":null,"abstract":"In this paper, we first consider the use of a spiral rather than the conventional raster scanning method for improving the imaging performance of an atomic force microscope (AFM). To generate spirals, single-frequency, slowly varying amplitude sine and cosine waves are applied to the X- and Y-piezos, respectively, of the piezoelectric tube scanner (PTS) of an AFM. To demonstrate the performance improvement with the spiral scanning method, a comparison of spiral and raster scanning techniques is presented. In each case, the closed-loop operation is performed using a multi-input multi-output (MIMO) model predictive control (MPC) scheme augmented with a vibration compensator to minimize the tracking error.","PeriodicalId":6490,"journal":{"name":"2015 International Conference on Electrical & Electronic Engineering (ICEEE)","volume":"21 1","pages":"217-220"},"PeriodicalIF":0.0000,"publicationDate":"2015-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Relative performance of spiral scan over raster scan in the AFM imaging\",\"authors\":\"M. S. Rana, H. Pota, I. Petersen\",\"doi\":\"10.1109/CEEE.2015.7428259\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, we first consider the use of a spiral rather than the conventional raster scanning method for improving the imaging performance of an atomic force microscope (AFM). To generate spirals, single-frequency, slowly varying amplitude sine and cosine waves are applied to the X- and Y-piezos, respectively, of the piezoelectric tube scanner (PTS) of an AFM. To demonstrate the performance improvement with the spiral scanning method, a comparison of spiral and raster scanning techniques is presented. In each case, the closed-loop operation is performed using a multi-input multi-output (MIMO) model predictive control (MPC) scheme augmented with a vibration compensator to minimize the tracking error.\",\"PeriodicalId\":6490,\"journal\":{\"name\":\"2015 International Conference on Electrical & Electronic Engineering (ICEEE)\",\"volume\":\"21 1\",\"pages\":\"217-220\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2015 International Conference on Electrical & Electronic Engineering (ICEEE)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/CEEE.2015.7428259\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 International Conference on Electrical & Electronic Engineering (ICEEE)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CEEE.2015.7428259","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Relative performance of spiral scan over raster scan in the AFM imaging
In this paper, we first consider the use of a spiral rather than the conventional raster scanning method for improving the imaging performance of an atomic force microscope (AFM). To generate spirals, single-frequency, slowly varying amplitude sine and cosine waves are applied to the X- and Y-piezos, respectively, of the piezoelectric tube scanner (PTS) of an AFM. To demonstrate the performance improvement with the spiral scanning method, a comparison of spiral and raster scanning techniques is presented. In each case, the closed-loop operation is performed using a multi-input multi-output (MIMO) model predictive control (MPC) scheme augmented with a vibration compensator to minimize the tracking error.