深亚微米体和SOI技术的发展

{"title":"深亚微米体和SOI技术的发展","authors":"M. Belleville, O. Faynot","doi":"10.1201/9781315220710-2","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":20456,"journal":{"name":"Proceedings of the 2007 international symposium on Low power electronics and design (ISLPED '07)","volume":"1 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2018-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Evolution of Deep Submicron Bulk and SOI Technologies\",\"authors\":\"M. Belleville, O. Faynot\",\"doi\":\"10.1201/9781315220710-2\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":20456,\"journal\":{\"name\":\"Proceedings of the 2007 international symposium on Low power electronics and design (ISLPED '07)\",\"volume\":\"1 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-10-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of the 2007 international symposium on Low power electronics and design (ISLPED '07)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1201/9781315220710-2\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 2007 international symposium on Low power electronics and design (ISLPED '07)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1201/9781315220710-2","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}