Tomoya Yoshida, Y. Atsumi, E. Omoda, Y. Sakakibara
{"title":"用arf浸没光刻技术制造垂直弯曲波导的宽带和偏振不敏感表面光耦合器","authors":"Tomoya Yoshida, Y. Atsumi, E. Omoda, Y. Sakakibara","doi":"10.1364/OFC.2019.TU2J.7","DOIUrl":null,"url":null,"abstract":"Vertically-curved Si waveguide fabricated using 45nm-node ArF-immersion lithography and ion implantation bending method showed <2.5dB minimum coupling loss, >130nm/0.5dB spectrum bandwidth for 5μm-MFD fiber coupling in both TE- and TM-polarization with very small polarization dependence.","PeriodicalId":6704,"journal":{"name":"2019 Optical Fiber Communications Conference and Exhibition (OFC)","volume":"23 1","pages":"1-3"},"PeriodicalIF":0.0000,"publicationDate":"2019-03-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Broadband and Polarization Insensitive Surface Optical Coupler using Vertically Curved Waveguides Fabricated with ArF-Immersion Lithography\",\"authors\":\"Tomoya Yoshida, Y. Atsumi, E. Omoda, Y. Sakakibara\",\"doi\":\"10.1364/OFC.2019.TU2J.7\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Vertically-curved Si waveguide fabricated using 45nm-node ArF-immersion lithography and ion implantation bending method showed <2.5dB minimum coupling loss, >130nm/0.5dB spectrum bandwidth for 5μm-MFD fiber coupling in both TE- and TM-polarization with very small polarization dependence.\",\"PeriodicalId\":6704,\"journal\":{\"name\":\"2019 Optical Fiber Communications Conference and Exhibition (OFC)\",\"volume\":\"23 1\",\"pages\":\"1-3\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-03-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2019 Optical Fiber Communications Conference and Exhibition (OFC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/OFC.2019.TU2J.7\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 Optical Fiber Communications Conference and Exhibition (OFC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/OFC.2019.TU2J.7","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Broadband and Polarization Insensitive Surface Optical Coupler using Vertically Curved Waveguides Fabricated with ArF-Immersion Lithography
Vertically-curved Si waveguide fabricated using 45nm-node ArF-immersion lithography and ion implantation bending method showed <2.5dB minimum coupling loss, >130nm/0.5dB spectrum bandwidth for 5μm-MFD fiber coupling in both TE- and TM-polarization with very small polarization dependence.
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