用于工业数码显微镜的低成本精密运动控制

Li Hong Idris Lim, Dazhi Yang
{"title":"用于工业数码显微镜的低成本精密运动控制","authors":"Li Hong Idris Lim, Dazhi Yang","doi":"10.1109/IECON.2017.8217275","DOIUrl":null,"url":null,"abstract":"This paper presents a reliable but low-cost way for industrial digital microscopy to implement μm-level precision of X/Y stage motion control. Other than the prevailing designs using stepper motors with open-loop control algorithms, the proposed method uses DC motors with closed-loop sliding mode control (SMC) to save the cost and allow a smooth switching between manual and motorized mode for stage movement. Boundary layer (saturator) method is then applied to alleviate the chattering cause by SMC, and its accuracy loss is completely eliminated by a simple position fine-tune trick to limit the error within ±2 μm. Comparing with the main stream μm-level industrial microscopies with stepper motors, the proposed solution achieves similar performance with almost half costs.","PeriodicalId":13098,"journal":{"name":"IECON 2017 - 43rd Annual Conference of the IEEE Industrial Electronics Society","volume":"28 1","pages":"7281-7287"},"PeriodicalIF":0.0000,"publicationDate":"2017-12-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Low-cost precision motion control for industrial digital microscopy\",\"authors\":\"Li Hong Idris Lim, Dazhi Yang\",\"doi\":\"10.1109/IECON.2017.8217275\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents a reliable but low-cost way for industrial digital microscopy to implement μm-level precision of X/Y stage motion control. Other than the prevailing designs using stepper motors with open-loop control algorithms, the proposed method uses DC motors with closed-loop sliding mode control (SMC) to save the cost and allow a smooth switching between manual and motorized mode for stage movement. Boundary layer (saturator) method is then applied to alleviate the chattering cause by SMC, and its accuracy loss is completely eliminated by a simple position fine-tune trick to limit the error within ±2 μm. Comparing with the main stream μm-level industrial microscopies with stepper motors, the proposed solution achieves similar performance with almost half costs.\",\"PeriodicalId\":13098,\"journal\":{\"name\":\"IECON 2017 - 43rd Annual Conference of the IEEE Industrial Electronics Society\",\"volume\":\"28 1\",\"pages\":\"7281-7287\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-12-18\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IECON 2017 - 43rd Annual Conference of the IEEE Industrial Electronics Society\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IECON.2017.8217275\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IECON 2017 - 43rd Annual Conference of the IEEE Industrial Electronics Society","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IECON.2017.8217275","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2

摘要

本文提出了一种可靠而低成本的工业数码显微镜X/Y台运动控制方法。与采用开环控制算法的步进电机设计不同,该方法采用具有闭环滑模控制(SMC)的直流电动机来节省成本,并允许在手动和电动模式之间平滑切换舞台运动。然后采用边界层(饱和器)方法缓解了SMC引起的抖振,并通过简单的位置微调技巧将误差限制在±2 μm以内,完全消除了SMC的精度损失。与采用步进电机的主流μm级工业显微镜相比,该方案的性能与主流的μm级工业显微镜相当,成本几乎为前者的一半。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
Low-cost precision motion control for industrial digital microscopy
This paper presents a reliable but low-cost way for industrial digital microscopy to implement μm-level precision of X/Y stage motion control. Other than the prevailing designs using stepper motors with open-loop control algorithms, the proposed method uses DC motors with closed-loop sliding mode control (SMC) to save the cost and allow a smooth switching between manual and motorized mode for stage movement. Boundary layer (saturator) method is then applied to alleviate the chattering cause by SMC, and its accuracy loss is completely eliminated by a simple position fine-tune trick to limit the error within ±2 μm. Comparing with the main stream μm-level industrial microscopies with stepper motors, the proposed solution achieves similar performance with almost half costs.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Analysis of the influence of train operation diagram adjustment on the working state and life of IGBT module of traction converter Real-time pothole detection system on vehicle using improved YOLOv5 in Malaysia an Interval Multiple Models Approach for Uncertain Nonlinear Systems Estimation Enhancement of DC MCB Performance using Power Semiconductor Devices Blended Learning for Remote Software Simulation Laboratory of a Solar Power System
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1