高分子改性MOSD制备的可调谐微带天线用Ba0.6Sr0.4TiO3厚膜

IF 1.3 4区 物理与天体物理 Q4 PHYSICS, CONDENSED MATTER Ferroelectrics Letters Section Pub Date : 2016-05-26 DOI:10.1080/07315171.2016.1172001
R. Upadhyay, Sriranganath Annam, M. Patel, A. Sharma, Pratik Mevada, U. Joshi
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引用次数: 3

摘要

频率和相位灵活的微带天线应用需要相对厚的钛酸钡锶(BST)薄膜,以获得良好的可调性。本文研究了聚合物(PEG-200)改性MOSD的工艺路线,在低损耗ST-X石英衬底上制备无裂纹(Ba0.6, Sr0.4) TiO3厚膜。利用原子力显微镜、x射线衍射、C-V和C-F表征等手段研究了沉积膜的结构和电特性。XRD表征表明该薄膜具有单BST相和多晶性质。AFM分析显示晶粒为等轴形,平均晶粒尺寸为120 nm,粗糙度为4.15 nm。采用导电氧化物LNO作为底电极的MIM电容结构,在1 MHz频率下,沉积膜的介电可调性、介电常数和损耗正切分别为36.46%、310和0.0213。通过设计、制造和测试一种共面结构的小型频率可调微带天线,验证了聚合物改性BST厚膜在低损耗衬底上作为微波频率可调微带天线复合衬底的适用性。在X波段表现出的可调谐性证明了所开发的加工路线适合于可调谐天线的应用。
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Ba0.6Sr0.4TiO3 thick film derived by polymer modified MOSD route for tunable microstrip antenna applications
ABSTRACT Frequency and phase agile microstrip antenna applications require relatively thick Barium Strontium Titanate (BST) films for good tunability. In this work, Polymer (PEG-200) modified MOSD process route is developed to produce cracks free (Ba0.6, Sr0.4) TiO3 Thick film on Low loss ST-X quartz substrate. Structural and electrical characteristics of the deposited films were investigated using Atomic Force Microscope, X-Ray Diffraction, C-V and C-F characterizations. XRD characterization conformed the single BST phase with polycrystalline nature of the film. AFM analysis depicted equiaxed shaped grains with average grain size and roughness of 120 nm and 4.15 nm respectively. Dielectric tunability, dielectric constant and loss tangent of the deposited films were 36.46%, 310 and 0.0213 respectively at 1 MHz frequency using MIM capacitive structure where conductive oxide LNO was used as bottom electrode. The applicability of polymer modified BST thick films over low loss substrate as composite substrate for tunable microstrip antenna applications at microwave frequency was demonstrated by design, fabrication and testing of a compact frequency tunable microstrip antenna in coplanar configuration. The tunability exhibited at X band frequency proves the suitability of developed processed route for tunable antenna applications.
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来源期刊
Ferroelectrics Letters Section
Ferroelectrics Letters Section 物理-物理:凝聚态物理
CiteScore
1.10
自引率
0.00%
发文量
1
审稿时长
4.8 months
期刊介绍: Ferroelectrics Letters is a separately published section of the international journal Ferroelectrics. Both sections publish theoretical, experimental and applied papers on ferroelectrics and related materials, including ferroelastics, ferroelectric ferromagnetics, electrooptics, piezoelectrics, pyroelectrics, nonlinear dielectrics, polymers and liquid crystals. Ferroelectrics Letters permits the rapid publication of important, quality, short original papers on the theory, synthesis, properties and applications of ferroelectrics and related materials.
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