{"title":"采用SH-SAW的P4J-3型浸入式液相传感器","authors":"T. Kogai, H. Yatsuda, S. Shiokawa","doi":"10.1109/ULTSYM.2007.526","DOIUrl":null,"url":null,"abstract":"This paper describes an SH-SAW based sensor device which can be directly dipped into a liquid. The sensor device is composed of a two-channel SH-SAW delay line on a 36Y-X LiTaO3. Those IDTs are surrounded with epoxy walls with a 50 mum height and a 160 mum thickness. Since the epoxy walls are constructed by a photo-lithography technique using a thick epoxy based photo resist, the thickness of wall can be minimized and as a result the SH-SAW propagation loss due to the walls can be minimized. Glass covers with an epoxy adhesive are attached onto the walls. Then air-cavities above the IDTs can be achieved and the IDTs can be perfectly isolated from the liquid. In this paper, experimental results of 50 MHz dip-type SH-SAW sensors on 36Y-X LiTaO3 are presented. Since the SH-SAW which propagates on the un-metallized propagation area in a liquid with a low permittivity attenuates due to surface skimming bulk wave excitation, the obtained permittivity and conductivity are slightly different from the exact values. In order to improve this drawback, a compensation method is presented.","PeriodicalId":6355,"journal":{"name":"2007 IEEE Ultrasonics Symposium Proceedings","volume":"42 1","pages":"2091-2094"},"PeriodicalIF":0.0000,"publicationDate":"2007-12-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"P4J-3 Dip-Type Liquid-Phase Sensor Using SH-SAW\",\"authors\":\"T. Kogai, H. Yatsuda, S. Shiokawa\",\"doi\":\"10.1109/ULTSYM.2007.526\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper describes an SH-SAW based sensor device which can be directly dipped into a liquid. The sensor device is composed of a two-channel SH-SAW delay line on a 36Y-X LiTaO3. Those IDTs are surrounded with epoxy walls with a 50 mum height and a 160 mum thickness. Since the epoxy walls are constructed by a photo-lithography technique using a thick epoxy based photo resist, the thickness of wall can be minimized and as a result the SH-SAW propagation loss due to the walls can be minimized. Glass covers with an epoxy adhesive are attached onto the walls. Then air-cavities above the IDTs can be achieved and the IDTs can be perfectly isolated from the liquid. In this paper, experimental results of 50 MHz dip-type SH-SAW sensors on 36Y-X LiTaO3 are presented. Since the SH-SAW which propagates on the un-metallized propagation area in a liquid with a low permittivity attenuates due to surface skimming bulk wave excitation, the obtained permittivity and conductivity are slightly different from the exact values. In order to improve this drawback, a compensation method is presented.\",\"PeriodicalId\":6355,\"journal\":{\"name\":\"2007 IEEE Ultrasonics Symposium Proceedings\",\"volume\":\"42 1\",\"pages\":\"2091-2094\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2007-12-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2007 IEEE Ultrasonics Symposium Proceedings\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ULTSYM.2007.526\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 IEEE Ultrasonics Symposium Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ULTSYM.2007.526","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
This paper describes an SH-SAW based sensor device which can be directly dipped into a liquid. The sensor device is composed of a two-channel SH-SAW delay line on a 36Y-X LiTaO3. Those IDTs are surrounded with epoxy walls with a 50 mum height and a 160 mum thickness. Since the epoxy walls are constructed by a photo-lithography technique using a thick epoxy based photo resist, the thickness of wall can be minimized and as a result the SH-SAW propagation loss due to the walls can be minimized. Glass covers with an epoxy adhesive are attached onto the walls. Then air-cavities above the IDTs can be achieved and the IDTs can be perfectly isolated from the liquid. In this paper, experimental results of 50 MHz dip-type SH-SAW sensors on 36Y-X LiTaO3 are presented. Since the SH-SAW which propagates on the un-metallized propagation area in a liquid with a low permittivity attenuates due to surface skimming bulk wave excitation, the obtained permittivity and conductivity are slightly different from the exact values. In order to improve this drawback, a compensation method is presented.
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