论太赫兹自由电子激光在非均匀气体流动中持续点放电的研究前景

2019 44th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz) Pub Date : 2019-09-01 DOI:10.1109/IRMMW-THz.2019.8874193

A. Vodopyanov, A. Sidorov, A. Veselov, V. Kubarev, O. Shevchenko, Y. Gorbachev

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引用次数: 2

摘要

提出了利用来自太赫兹自由电子激光器的高功率辐射在非均匀气体流动中产生局部(点状)放电的方法。在这样一个系统中可以实现的等离子体参数为为下一代投影光刻技术创造有效的极紫外光点状光源开辟了前景。

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On the Prospects for the Study of a Point Discharge Sustained by a Terahertz Free Electron Laser Radiation in an Inhomogeneous Gas Flow

It is proposed to use high-power radiation from a terahertz free electron laser to create a localized (point-like) discharge in an inhomogeneous gas flow. Plasma parameters that can be achieved in such a system open up prospects for creating an effective point-like source of extreme ultraviolet light for the next-generation projection lithography.

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2019 44th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz)

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