不同波长下蚀刻N型多孔硅的纳米线尺寸依赖性光致发光和拉曼研究

M. Zaid, Abid, S. S. Islam, M. Husain
{"title":"不同波长下蚀刻N型多孔硅的纳米线尺寸依赖性光致发光和拉曼研究","authors":"M. Zaid, Abid, S. S. Islam, M. Husain","doi":"10.1109/ICPECA47973.2019.8975664","DOIUrl":null,"url":null,"abstract":"A comparative study of N type porous silicon (PS) morphology by using Field Emission Scanning Electron Microscope (FESEM) Imaging, Raman Spectroscopy and Photoluminescence (PL) spectroscopy analysis. Samples of crystalline silicon were electrochemically etched at a constant current density and a constant anodization time illuminated under different wavelengths of visible light emitted by LEDs to convert them into nanowire-based PS wafers. FESEM characterization showed formation of nanowires of different porosities on the wafer for varying wavelengths subjected to the samples during etching. Raman spectroscopy further showed right shift in Raman peaks of the amorphous silicon wafer while PL spectroscopy concluded in tuning of energy band gap of the samples illuminated under different wavelengths of light. In this work, we show the differences obtained in the behavior of PS when etched under different degrees of illumination for further application in fabrication of integrated silicon-based optoelectronic systems as the properties of a porous silicon such as porosity, pore diameter and thickness depend heavily on the fabrication process and can be comfortably controlled.","PeriodicalId":6761,"journal":{"name":"2019 International Conference on Power Electronics, Control and Automation (ICPECA)","volume":"25 1","pages":"1-4"},"PeriodicalIF":0.0000,"publicationDate":"2019-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Nanowire based size-dependent Photoluminescence and Raman studies of N type porous silicon etched under illumination of varying wavelengths\",\"authors\":\"M. Zaid, Abid, S. S. Islam, M. Husain\",\"doi\":\"10.1109/ICPECA47973.2019.8975664\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A comparative study of N type porous silicon (PS) morphology by using Field Emission Scanning Electron Microscope (FESEM) Imaging, Raman Spectroscopy and Photoluminescence (PL) spectroscopy analysis. Samples of crystalline silicon were electrochemically etched at a constant current density and a constant anodization time illuminated under different wavelengths of visible light emitted by LEDs to convert them into nanowire-based PS wafers. FESEM characterization showed formation of nanowires of different porosities on the wafer for varying wavelengths subjected to the samples during etching. Raman spectroscopy further showed right shift in Raman peaks of the amorphous silicon wafer while PL spectroscopy concluded in tuning of energy band gap of the samples illuminated under different wavelengths of light. In this work, we show the differences obtained in the behavior of PS when etched under different degrees of illumination for further application in fabrication of integrated silicon-based optoelectronic systems as the properties of a porous silicon such as porosity, pore diameter and thickness depend heavily on the fabrication process and can be comfortably controlled.\",\"PeriodicalId\":6761,\"journal\":{\"name\":\"2019 International Conference on Power Electronics, Control and Automation (ICPECA)\",\"volume\":\"25 1\",\"pages\":\"1-4\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2019 International Conference on Power Electronics, Control and Automation (ICPECA)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICPECA47973.2019.8975664\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 International Conference on Power Electronics, Control and Automation (ICPECA)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICPECA47973.2019.8975664","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

利用场发射扫描电镜(FESEM)成像、拉曼光谱和光致发光(PL)光谱分析对N型多孔硅(PS)的形貌进行了比较研究。在恒定的电流密度和恒定的阳极化时间下,在led发出的不同波长的可见光照射下,对晶体硅样品进行电化学蚀刻,将其转化为基于纳米线的PS晶圆。FESEM表征表明,在不同波长的晶圆上形成了不同孔隙率的纳米线。拉曼光谱进一步显示非晶硅片的拉曼峰右移,而PL光谱显示不同波长光照射下样品的能带间隙有调谐。在这项工作中,我们展示了在不同照明程度下蚀刻时PS行为的差异,以便进一步应用于集成硅基光电系统的制造,因为多孔硅的特性,如孔隙率,孔径和厚度在很大程度上取决于制造工艺,并且可以轻松控制。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
Nanowire based size-dependent Photoluminescence and Raman studies of N type porous silicon etched under illumination of varying wavelengths
A comparative study of N type porous silicon (PS) morphology by using Field Emission Scanning Electron Microscope (FESEM) Imaging, Raman Spectroscopy and Photoluminescence (PL) spectroscopy analysis. Samples of crystalline silicon were electrochemically etched at a constant current density and a constant anodization time illuminated under different wavelengths of visible light emitted by LEDs to convert them into nanowire-based PS wafers. FESEM characterization showed formation of nanowires of different porosities on the wafer for varying wavelengths subjected to the samples during etching. Raman spectroscopy further showed right shift in Raman peaks of the amorphous silicon wafer while PL spectroscopy concluded in tuning of energy band gap of the samples illuminated under different wavelengths of light. In this work, we show the differences obtained in the behavior of PS when etched under different degrees of illumination for further application in fabrication of integrated silicon-based optoelectronic systems as the properties of a porous silicon such as porosity, pore diameter and thickness depend heavily on the fabrication process and can be comfortably controlled.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Direct Power Control of Dual Active Bridge Bidirectional DC-DC Converter A Review of Omega Based Portfolio Optimization Control of Multilevel Inverter as Shunt Active Power Filter using Maximum Versoria Criterion Real Time Analysis of VFT for Asynchronous Power Flow Control using Typhoon HIL Comparison of Different Microstrip Patch Antennas with Proposed RMPA for Wireless Applications
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1