{"title":"采用垂直梳状微镜和张力薄膜扭杆实现大旋转、低电压驱动","authors":"S. Yuuki, M. Sasaki, K. Hane","doi":"10.1109/SENSOR.2005.1497284","DOIUrl":null,"url":null,"abstract":"A micromirror device is developed realizing the large-rotation and the low-voltage driving. The bulk Si micromirror is suspended with the thin film torsion bars. Inside the torsion bar, the tension is included for suppressing the additional movement (e.g., vertical movement or in-plane rotation). The torsion bar can be compliant in the mirror rotation and stiff in other movement. The rotation of 7.3 degrees is obtained at 5 V.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"55 1","pages":"1163-1166 Vol. 2"},"PeriodicalIF":0.0000,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Large-rotation and low-voltage driving realized by micromirror with vertical comb and tense thin film torsion bar\",\"authors\":\"S. Yuuki, M. Sasaki, K. Hane\",\"doi\":\"10.1109/SENSOR.2005.1497284\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A micromirror device is developed realizing the large-rotation and the low-voltage driving. The bulk Si micromirror is suspended with the thin film torsion bars. Inside the torsion bar, the tension is included for suppressing the additional movement (e.g., vertical movement or in-plane rotation). The torsion bar can be compliant in the mirror rotation and stiff in other movement. The rotation of 7.3 degrees is obtained at 5 V.\",\"PeriodicalId\":22359,\"journal\":{\"name\":\"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.\",\"volume\":\"55 1\",\"pages\":\"1163-1166 Vol. 2\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2005-06-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SENSOR.2005.1497284\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SENSOR.2005.1497284","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Large-rotation and low-voltage driving realized by micromirror with vertical comb and tense thin film torsion bar
A micromirror device is developed realizing the large-rotation and the low-voltage driving. The bulk Si micromirror is suspended with the thin film torsion bars. Inside the torsion bar, the tension is included for suppressing the additional movement (e.g., vertical movement or in-plane rotation). The torsion bar can be compliant in the mirror rotation and stiff in other movement. The rotation of 7.3 degrees is obtained at 5 V.
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