{"title":"利用反射物镜的微点光谱椭偏仪的研制","authors":"Sungmo Park, Geonu Park, An Ilsin","doi":"10.5958/2454-762X.2017.00022.1","DOIUrl":null,"url":null,"abstract":"We developed a micro-spot spectroscopic ellipsometer using reflective objective, which has twomirrored Schwarzschild configuration. Using only small portion of numerical aperture and selecting off-axis illumination, we achieved spotsize of 60 micrometer in diameter. As the object is composed of mirrors, chromatic abberation was not a concern but reflection from mirrors caused polarization errors. We show details of the system including the effects of polarization errors.","PeriodicalId":14491,"journal":{"name":"Invertis Journal of Science & Technology","volume":"41 3 1","pages":"142-147"},"PeriodicalIF":0.0000,"publicationDate":"2017-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Development of micro-spot spectroscopic ellipsometer using reflective objectives\",\"authors\":\"Sungmo Park, Geonu Park, An Ilsin\",\"doi\":\"10.5958/2454-762X.2017.00022.1\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We developed a micro-spot spectroscopic ellipsometer using reflective objective, which has twomirrored Schwarzschild configuration. Using only small portion of numerical aperture and selecting off-axis illumination, we achieved spotsize of 60 micrometer in diameter. As the object is composed of mirrors, chromatic abberation was not a concern but reflection from mirrors caused polarization errors. We show details of the system including the effects of polarization errors.\",\"PeriodicalId\":14491,\"journal\":{\"name\":\"Invertis Journal of Science & Technology\",\"volume\":\"41 3 1\",\"pages\":\"142-147\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Invertis Journal of Science & Technology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.5958/2454-762X.2017.00022.1\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Invertis Journal of Science & Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.5958/2454-762X.2017.00022.1","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Development of micro-spot spectroscopic ellipsometer using reflective objectives
We developed a micro-spot spectroscopic ellipsometer using reflective objective, which has twomirrored Schwarzschild configuration. Using only small portion of numerical aperture and selecting off-axis illumination, we achieved spotsize of 60 micrometer in diameter. As the object is composed of mirrors, chromatic abberation was not a concern but reflection from mirrors caused polarization errors. We show details of the system including the effects of polarization errors.
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