光谱椭偏法无损分析表面、薄膜和界面的最新进展

Applications of Surface Science Pub Date : 1985-05-01 DOI:10.1016/0378-5963(85)90212-0

D.E. Aspnes

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引用次数: 13

摘要

光谱椭偏法的优点包括仪器相对简单，对薄膜的成分、密度和微观结构的灵敏度，对吸附物、覆盖层和界面的亚单层灵敏度，以及在任何透明环境下无损地、实时地提供这些信息的能力。在本文中，我讨论了仪器、数据分析和应用程序的当前趋势和可能的未来方向，并通过各种示例说明了当前的功能。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Recent progress in the nondestructive analysis of surfaces, thin films, and interfaces by spectroellipsometry

The advantages of spectroellipsometry include relative instrumentational simplicity, sensitivity to composition, density, and microstructure of thin films, submonolayer sensitivity to adsorbates, overlayers, and interfaces, and the capability of providing this information nondestructively, in real time, and in any transparent ambient. In this paper I discuss present trends and likely future directions for instrumentation, data analysis, and applications, and illustrate present capabilities by various examples.

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