热感知移动SoC设计与14nm晶圆技术测试

B. Lee
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摘要

热特性是移动SOC产品的关键指标之一。通常,工艺缩放倾向于通过降低功率来改善整体热特性;然而,由于更高的功率密度,也增加了局部热点问题。此外,微场效应器件技术引入了一个新的热问题,称为“自热”。因此,为了确保产品的产量和质量,三星正在从设计到测试全面考虑散热问题。在这次演讲中,我们将讨论三个关键的热问题;finet器件的自热、片上热热点和设置级热致性能下降。为了解决这些问题,我们加强了设计和测试流程,以防止和筛选热问题,并在第一个14nm finet工艺的移动SOC产品中进行了验证。
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Thermal-aware mobile SoC design and test in 14nm finfet technology
Thermal characteristic is one of the key specifications in mobile SOC products. Typically, process scaling tends to improve global thermal characteristics by power reduction; however, it also increases local hot-spot issues due to higher power density. Moreover, the finfet device technology introduces a new thermal problem, called “self-heating.” Therefore, Samsung is considering thermal issues comprehensively from design to test in order to ensure both product yield and quality. In this talk, we will address three key thermal problems; the self-heating in finfet device, the on-chip thermal hot-spots, and the set-level thermal-induced performance degradation. To tackle these obstacles, the design and test flows were enhanced to prevent and screen the thermal problems, and they were validated in the first mobile SOC product of 14nm finfet process.
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