非晶硅技术及其在光电器件中的应用进展

Applications of Surface Science Pub Date : 1985-05-01 DOI:10.1016/0378-5963(85)90219-3

Yoshihiro Hamakawa

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引用次数: 6

摘要

综述了近年来四面体键合非晶半导体的研究进展及其在光电器件中的应用。首先，指出了这些材料的一些显著优点，并从当前的技术课题中举出了具体的例子。然后回顾了利用这种新型薄膜开发光电器件的现状，并对技术数据进行了总结和讨论。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Recent progress of amorphous silicon technology and its application to optoelectronic devices

A review is given on recent progress in tetrahedrally-bonded amorphous semiconductors and their technological applications to optoelectronic devices. First, some significant advantages of these materials are pointed out, and tangible instances are demonstrated from current technological topics. The present state of the art in optoelectronic device development with this new kind of thin film is then reviewed, and the technical data are summarized and discussed.

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