低能氢等离子体辐照feral合金的表面改性和溅射

G. Tolstolutskaya, M. Tikhonovsky, V. Voyevodin, A. V. Nikitin, Aleksander S. Tortika, R. Vasilenko
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引用次数: 1

摘要

本文研究了商用和实验用钇、钼、锆合金铁铁复合材料的溅射和表面改性工艺。利用场发射扫描电镜观察发现,在通量为3.2⋅1020 m-2⋅s-1、通量为4⋅1024 m-2的低能(500 eV)氢等离子体的作用下,合金表面形貌主要是沿晶界形成沟槽、宏观和微观裂纹以及析出物溅射形成的颗粒内凹坑。利用能量色散x射线谱仪测定析出相的组成,确定了氧化铝优先分布在fecral基合金的晶粒中,而钇的氧化物则沿晶界局部分布。腐蚀实验结果表明,所有合金的氢溅射产率在1.05 ~ 0.38 at之间。/离子,不超过已公布的纯铁和铬的数据。在实验合金中掺杂钇和钼,得到的溅射系数比钢SS304低几倍,仅比钨高1.5倍。
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Surface modification and sputtering of FeCrAl alloys exposed to low-energy hydrogen plasmas
In the present paper processes of sputtering and surface modification of commercial and experimental FeCrAl composites alloyed with yttrium, molybdenum and zirconium were investigated. Using a field-emission scanning electron microscope, it was shown that under the influence of low-energy (500 eV) hydrogen plasma with a flux about 3.2 ⋅ 1020 m–2 ⋅ s–1 and fluence 4 ⋅ 1024 m–2 at Troom, surface morphology develops due to the formation of grooves along grain boundaries, macro- and microcracks, as well as intragranular pits due to the sputtering of precipitates. Determination of the composition of precipitates by an energy dispersive X-ray spectrometer allowed to establish that aluminum oxide is preferentially distributed in the grains of FeCrAl-based alloys, and yttrium oxides are localized along grain boundaries. Results of erosion studies indicated that the sputtering yields for hydrogen on all alloys are 1.05– 0.38 at./ion and doesn’t exceed those for published data for pure iron and chromium. For experimental alloys doped with yttrium and molybdenum found that the obtained sputtering coefficients were in several times lower than for steel SS304 and only one and a half times higher compared to tungsten.
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