A. Kovalgin, Francoise Chabert-Rocabois, M. Hitchman, S. H. Shamlian, S. Alexandrov
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A study by In Situ FTIR Spectroscopy of the Decomposition of Precursors for the MOCVD of High Temperature Superconductors
In this paper we report on a study by FTIR spectroscopy of the gas phase thermal decomposition of [Y(TMHD) 3 ], [Cu(TMHD) 2 ] and [Ba(TDFND) 2 .tetraglyme] under a total pressure of 10 Torr, for a temperature range 200 - 650°C, and in the absence and presence of oxygen. The variation of the decomposition characteristics for each of the complexes as a function of temperature, and as shown by changes in the absorption coefficients, are related to the molecular structures.
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