液体环境下Love波传感器装置的设计

B. Jakoby, A. Venema, M. Vellekoop
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引用次数: 14

摘要

爱波传感器是一种高灵敏度的微声器件,非常适合于液体传感应用。因此,洛夫波装置的成功利用需要适当的屏蔽,以避免液体与波和换能器的不必要的电相互作用。在这篇文章中,我们描述了这种电相互作用的影响和屏蔽的适当设计来防止它。给出了各种相互作用影响的分析方法,并为盾构的优化设计提供了准则。最后给出了根据这些设计规则制作的器件的实验结果。
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Design of Love wave sensor devices for the operation in liquid environments
Love wave sensors are highly sensitive microacoustic devices, which are well suited for liquid sensing applications. The successful utilization of Love wave devices thereby requires proper shielding to avoid unwanted electric interaction of the liquid with the wave and the transducers. In this contribution we describe the effects of this electric interaction and the proper design of a shield to prevent it. Analysis methods illustrating the impact of the interaction and providing rules for the optimized design of the proposed shield are presented. Finally we show experimental results for devices that have been fabricated according to these design rules.
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