脉冲等离子体增强和热解化学气相沉积的氟碳膜结构分子设计

{"title":"脉冲等离子体增强和热解化学气相沉积的氟碳膜结构分子设计","authors":"S. Limb, K. Lau, D. Edell, E. F. Gleason, K. Gleason","doi":"10.1023/A:1021899414807","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":20249,"journal":{"name":"Plasmas and Polymers","volume":"27 1","pages":"21-32"},"PeriodicalIF":0.0000,"publicationDate":"1999-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"66","resultStr":"{\"title\":\"Molecular Design of Fluorocarbon Film Architecture by Pulsed Plasma Enhanced and Pyrolytic Chemical Vapor Deposition\",\"authors\":\"S. Limb, K. Lau, D. Edell, E. F. Gleason, K. Gleason\",\"doi\":\"10.1023/A:1021899414807\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":20249,\"journal\":{\"name\":\"Plasmas and Polymers\",\"volume\":\"27 1\",\"pages\":\"21-32\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1999-03-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"66\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Plasmas and Polymers\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1023/A:1021899414807\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Plasmas and Polymers","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1023/A:1021899414807","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}