{"title":"一种模块化高压静电驱动器的小型化平台","authors":"Yanqiao Li, Bahlakoana Mabetha, J. Stauth","doi":"10.1109/COMPEL52896.2023.10221100","DOIUrl":null,"url":null,"abstract":"High voltage drivers are needed for electrostatic and piezoelectric actuators in small-scale electromechanical systems such as microrobotics and haptics. This paper presents a miniaturized platform for a modular switched-capacitor-based driver, implemented in a 180nm HV-SOI CMOS integrated circuit (IC), that uses less than 5 $\\mu$A quiescent current per chip and includes an auxiliary (magnetic) boost converter to interface with low-voltage (~2.5-3.7V) batteries. The platform allows multiple PCB modules to stack in series voltage domains, extending drive voltages to the kilovolt-range, beyond the process and buried-oxide (BOX) limits of a single chip. Compared to past work with the same IC [1], the improved platform achieves >100$\\times$ volume reduction and >30$\\times$ weight reduction; with eight boards stacked, the system can provide peak-peak drive voltages up to 3 kV from a 3.7V supply (voltage conversion ratios VCR >800), delivering and recovering ~1W reactive power with over 97% efficiency.","PeriodicalId":55233,"journal":{"name":"Compel-The International Journal for Computation and Mathematics in Electrical and Electronic Engineering","volume":"2 1","pages":"1-8"},"PeriodicalIF":1.0000,"publicationDate":"2023-06-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A Miniaturized Platform for a Modular High-Voltage Electrostatic Actuator Driver\",\"authors\":\"Yanqiao Li, Bahlakoana Mabetha, J. Stauth\",\"doi\":\"10.1109/COMPEL52896.2023.10221100\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"High voltage drivers are needed for electrostatic and piezoelectric actuators in small-scale electromechanical systems such as microrobotics and haptics. This paper presents a miniaturized platform for a modular switched-capacitor-based driver, implemented in a 180nm HV-SOI CMOS integrated circuit (IC), that uses less than 5 $\\\\mu$A quiescent current per chip and includes an auxiliary (magnetic) boost converter to interface with low-voltage (~2.5-3.7V) batteries. The platform allows multiple PCB modules to stack in series voltage domains, extending drive voltages to the kilovolt-range, beyond the process and buried-oxide (BOX) limits of a single chip. Compared to past work with the same IC [1], the improved platform achieves >100$\\\\times$ volume reduction and >30$\\\\times$ weight reduction; with eight boards stacked, the system can provide peak-peak drive voltages up to 3 kV from a 3.7V supply (voltage conversion ratios VCR >800), delivering and recovering ~1W reactive power with over 97% efficiency.\",\"PeriodicalId\":55233,\"journal\":{\"name\":\"Compel-The International Journal for Computation and Mathematics in Electrical and Electronic Engineering\",\"volume\":\"2 1\",\"pages\":\"1-8\"},\"PeriodicalIF\":1.0000,\"publicationDate\":\"2023-06-25\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Compel-The International Journal for Computation and Mathematics in Electrical and Electronic Engineering\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://doi.org/10.1109/COMPEL52896.2023.10221100\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"COMPUTER SCIENCE, INTERDISCIPLINARY APPLICATIONS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Compel-The International Journal for Computation and Mathematics in Electrical and Electronic Engineering","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1109/COMPEL52896.2023.10221100","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"COMPUTER SCIENCE, INTERDISCIPLINARY APPLICATIONS","Score":null,"Total":0}
A Miniaturized Platform for a Modular High-Voltage Electrostatic Actuator Driver
High voltage drivers are needed for electrostatic and piezoelectric actuators in small-scale electromechanical systems such as microrobotics and haptics. This paper presents a miniaturized platform for a modular switched-capacitor-based driver, implemented in a 180nm HV-SOI CMOS integrated circuit (IC), that uses less than 5 $\mu$A quiescent current per chip and includes an auxiliary (magnetic) boost converter to interface with low-voltage (~2.5-3.7V) batteries. The platform allows multiple PCB modules to stack in series voltage domains, extending drive voltages to the kilovolt-range, beyond the process and buried-oxide (BOX) limits of a single chip. Compared to past work with the same IC [1], the improved platform achieves >100$\times$ volume reduction and >30$\times$ weight reduction; with eight boards stacked, the system can provide peak-peak drive voltages up to 3 kV from a 3.7V supply (voltage conversion ratios VCR >800), delivering and recovering ~1W reactive power with over 97% efficiency.
期刊介绍：
COMPEL exists for the discussion and dissemination of computational and analytical methods in electrical and electronic engineering. The main emphasis of papers should be on methods and new techniques, or the application of existing techniques in a novel way. Whilst papers with immediate application to particular engineering problems are welcome, so too are papers that form a basis for further development in the area of study. A double-blind review process ensures the content''s validity and relevance.
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